Rutherford Backscattering and Luminescence Studies Erbium Implanted Silicon

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Veröffentlicht in:	中国稀土学报：英文版 1994-09 (3), p.179-182
1. Verfasser:	李仪李菊生金亿鑫时伯荣蒋红翟宏营刘学彦刘向东
Format:	Artikel
Sprache:	eng
Schlagworte:	Erbium implantation Ion Luminescence Silicon
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source	Alma/SFX Local Collection
subjects	Erbium implantation Ion Luminescence Silicon
title	Rutherford Backscattering and Luminescence Studies Erbium Implanted Silicon
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