Rutherford Backscattering and Luminescence Studies Erbium Implanted Silicon

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Veröffentlicht in:中国稀土学报:英文版 1994-09 (3), p.179-182
1. Verfasser: 李仪 李菊生 金亿鑫 时伯荣 蒋红 翟宏营 刘学彦 刘向东
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creator 李仪 李菊生 金亿鑫 时伯荣 蒋红 翟宏营 刘学彦 刘向东
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identifier ISSN: 1002-0721
ispartof 中国稀土学报:英文版, 1994-09 (3), p.179-182
issn 1002-0721
2509-4963
language eng
recordid cdi_chongqing_primary_4001420189
source Alma/SFX Local Collection
subjects Erbium
implantation
Ion
Luminescence
Silicon
title Rutherford Backscattering and Luminescence Studies Erbium Implanted Silicon
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