THE INFLUENCE OF INTERACTION POTENTIALS ON COMPUTER SIMULATION RESULTS OF SPUTTERING

THE INFLUENCE OF INTERACTION POTENTIALS ON COMPUTER SIMULATION RESULTS OF SPUTTERING

In all studies of the interaction of energetic particles with solids, the interatomic potential plays an important role. In many processes it is the dominant factor in the events which lead to backscattering, sputtering, radiation damage and to the spatial distributions of implanted ions and recoili...

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Veröffentlicht in:中国科学通报：英文版 1992 (22), p.1877-1880
1. Verfasser: 邵其鋆 潘正瑛 霍裕昆 陈建新
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Sprache:eng
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Carlo
interaction
Monte
potential
simulation
sputtering
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creator 邵其鋆 潘正瑛 霍裕昆 陈建新
description In all studies of the interaction of energetic particles with solids, the interatomic potential plays an important role. In many processes it is the dominant factor in the events which lead to backscattering, sputtering, radiation damage and to the spatial distributions of implanted ions and recoiling atoms. The reason for this is that there is the relationship between the scattering angle θ(ε, b) in the CM system and the interatomic potential V(x) as follows:
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subjects Carlo
interaction
Monte
potential
simulation
sputtering
title THE INFLUENCE OF INTERACTION POTENTIALS ON COMPUTER SIMULATION RESULTS OF SPUTTERING
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