Analysis of Modified Williamson-Hall Plots on GaN Layers
Williamson Hall （W-H） analysis is often used to separate the lateral coherence length （LCL） broadening and dislocation broadening＂ on the ω-sean with a Lorentzian distribution. However, besides the LCL broadening and dislocation broadening, curvature also can broaden the w-scan peak. Usually, the w-...
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| Veröffentlicht in: | Chinese physics letters 2011, Vol.28 (1), p.145-148 |
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| creator | Liu, Jian-Qi (建奇 刘) Qiu, Yong-Xin (永鑫 邱) Wang, Jian-Feng (建峰 王) Xu, Ke (科徐) Yang, Hui (辉杨) |
| description | Williamson Hall （W-H） analysis is often used to separate the lateral coherence length （LCL） broadening and dislocation broadening＂ on the ω-sean with a Lorentzian distribution. However, besides the LCL broadening and dislocation broadening, curvature also can broaden the w-scan peak. Usually, the w-scan can be described by a Pseudo-Voigt （P-V） function more precisely than a Lorentzian function. Based on the P-V fit peak profile, we modify the W-H plots. Both LCL broadening and curvature broadening can be eliminated from （OOl） ω-scans plots simultaneously, and a reliable tilt can be obtained. This method is a good complementary for the existing method, but is more convenient. Although we focuse on GaN layers, the results are applicable to a wide range of other materials having mosaic structures. |
| doi_str_mv | 10.1088/0256-307X/28/1/016101 |
| format | Article |
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However, besides the LCL broadening and dislocation broadening, curvature also can broaden the w-scan peak. Usually, the w-scan can be described by a Pseudo-Voigt （P-V） function more precisely than a Lorentzian function. Based on the P-V fit peak profile, we modify the W-H plots. Both LCL broadening and curvature broadening can be eliminated from （OOl） ω-scans plots simultaneously, and a reliable tilt can be obtained. This method is a good complementary for the existing method, but is more convenient. Although we focuse on GaN layers, the results are applicable to a wide range of other materials having mosaic structures.</description><identifier>ISSN: 0256-307X</identifier><identifier>EISSN: 1741-3540</identifier><identifier>DOI: 10.1088/0256-307X/28/1/016101</identifier><language>eng</language><publisher>IOP Publishing</publisher><subject>大曲率 ; 扫描图 ; 洛伦兹 ; 相干长度 ; 马赛克</subject><ispartof>Chinese physics letters, 2011, Vol.28 (1), p.145-148</ispartof><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c321t-8dd67ff04bf0c29f4ca51a4313ea721500796f799a92c636822d70089304f2183</citedby><cites>FETCH-LOGICAL-c321t-8dd67ff04bf0c29f4ca51a4313ea721500796f799a92c636822d70089304f2183</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Uhttp://image.cqvip.com/vip1000/qk/84212X/84212X.jpg</thumbnail><linktopdf>$$Uhttps://iopscience.iop.org/article/10.1088/0256-307X/28/1/016101/pdf$$EPDF$$P50$$Giop$$H</linktopdf><link.rule.ids>314,776,780,4010,27900,27901,27902,53805,53885</link.rule.ids></links><search><creatorcontrib>Liu, Jian-Qi (建奇 刘)</creatorcontrib><creatorcontrib>Qiu, Yong-Xin (永鑫 邱)</creatorcontrib><creatorcontrib>Wang, Jian-Feng (建峰 王)</creatorcontrib><creatorcontrib>Xu, Ke (科徐)</creatorcontrib><creatorcontrib>Yang, Hui (辉杨)</creatorcontrib><title>Analysis of Modified Williamson-Hall Plots on GaN Layers</title><title>Chinese physics letters</title><addtitle>Chinese Physics Letters</addtitle><description>Williamson Hall （W-H） analysis is often used to separate the lateral coherence length （LCL） broadening and dislocation broadening＂ on the ω-sean with a Lorentzian distribution. However, besides the LCL broadening and dislocation broadening, curvature also can broaden the w-scan peak. Usually, the w-scan can be described by a Pseudo-Voigt （P-V） function more precisely than a Lorentzian function. Based on the P-V fit peak profile, we modify the W-H plots. Both LCL broadening and curvature broadening can be eliminated from （OOl） ω-scans plots simultaneously, and a reliable tilt can be obtained. This method is a good complementary for the existing method, but is more convenient. Although we focuse on GaN layers, the results are applicable to a wide range of other materials having mosaic structures.</description><subject>大曲率</subject><subject>扫描图</subject><subject>洛伦兹</subject><subject>相干长度</subject><subject>马赛克</subject><issn>0256-307X</issn><issn>1741-3540</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2011</creationdate><recordtype>article</recordtype><recordid>eNqNj8tOwzAURC0EEqHwCUgR-5B77fiRZVVBixQeCxDsLDeJi8GNS9xN_p5GqVizms2cGR1CrhFuEZTKgXKRMZAfOVU55oACAU9IgrLAjPECTkny1zknFzF-ASAqxISoeWf8EF1Mg00fQ-Osa5v03XnvzDaGLlsZ79MXH_aHRpcuzVNamaHt4yU5s8bH9uqYM_J2f_e6WGXV8_JhMa-ymlHcZ6pphLQWirWFmpa2qA1HUzBkrZEUOYAshZVlaUpaCyYUpY0EUCWDwlJUbEb4tFv3Ica-tXrXu63pB42gR309qulRTVOlUU_6Bw4mzoXdv5Gb49Vn6DY_rtvotam_rfOtZoJyioyzXwS1ZN4</recordid><startdate>2011</startdate><enddate>2011</enddate><creator>Liu, Jian-Qi (建奇 刘)</creator><creator>Qiu, Yong-Xin (永鑫 邱)</creator><creator>Wang, Jian-Feng (建峰 王)</creator><creator>Xu, Ke (科徐)</creator><creator>Yang, Hui (辉杨)</creator><general>IOP Publishing</general><scope>2RA</scope><scope>92L</scope><scope>CQIGP</scope><scope>~WA</scope><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>2011</creationdate><title>Analysis of Modified Williamson-Hall Plots on GaN Layers</title><author>Liu, Jian-Qi (建奇 刘) ; Qiu, Yong-Xin (永鑫 邱) ; Wang, Jian-Feng (建峰 王) ; Xu, Ke (科徐) ; Yang, Hui (辉杨)</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c321t-8dd67ff04bf0c29f4ca51a4313ea721500796f799a92c636822d70089304f2183</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2011</creationdate><topic>大曲率</topic><topic>扫描图</topic><topic>洛伦兹</topic><topic>相干长度</topic><topic>马赛克</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Liu, Jian-Qi (建奇 刘)</creatorcontrib><creatorcontrib>Qiu, Yong-Xin (永鑫 邱)</creatorcontrib><creatorcontrib>Wang, Jian-Feng (建峰 王)</creatorcontrib><creatorcontrib>Xu, Ke (科徐)</creatorcontrib><creatorcontrib>Yang, Hui (辉杨)</creatorcontrib><collection>中文科技期刊数据库</collection><collection>中文科技期刊数据库-CALIS站点</collection><collection>中文科技期刊数据库-7.0平台</collection><collection>中文科技期刊数据库- 镜像站点</collection><collection>CrossRef</collection><jtitle>Chinese physics letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Liu, Jian-Qi (建奇 刘)</au><au>Qiu, Yong-Xin (永鑫 邱)</au><au>Wang, Jian-Feng (建峰 王)</au><au>Xu, Ke (科徐)</au><au>Yang, Hui (辉杨)</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Analysis of Modified Williamson-Hall Plots on GaN Layers</atitle><jtitle>Chinese physics letters</jtitle><addtitle>Chinese Physics Letters</addtitle><date>2011</date><risdate>2011</risdate><volume>28</volume><issue>1</issue><spage>145</spage><epage>148</epage><pages>145-148</pages><issn>0256-307X</issn><eissn>1741-3540</eissn><abstract>Williamson Hall （W-H） analysis is often used to separate the lateral coherence length （LCL） broadening and dislocation broadening＂ on the ω-sean with a Lorentzian distribution. However, besides the LCL broadening and dislocation broadening, curvature also can broaden the w-scan peak. Usually, the w-scan can be described by a Pseudo-Voigt （P-V） function more precisely than a Lorentzian function. Based on the P-V fit peak profile, we modify the W-H plots. Both LCL broadening and curvature broadening can be eliminated from （OOl） ω-scans plots simultaneously, and a reliable tilt can be obtained. This method is a good complementary for the existing method, but is more convenient. Although we focuse on GaN layers, the results are applicable to a wide range of other materials having mosaic structures.</abstract><pub>IOP Publishing</pub><doi>10.1088/0256-307X/28/1/016101</doi><tpages>4</tpages></addata></record> |
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| source | IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link |
| subjects | 大曲率 扫描图 洛伦兹 相干长度 马赛克 |
| title | Analysis of Modified Williamson-Hall Plots on GaN Layers |
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