Thickness dependence of grain size and surface roughness for dc magnetron sputtered Au films

The grain size and surface morphology of sputtered Au films are studied by x-ray diffraction and atomic force microscope. For as-deposited samples the grain growth mechanism is consistent with the two-dimensional （2D） theory, which gives relatively low diffusion coefficient during deposition. Anneal...

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Veröffentlicht in:	Chinese physics B 2010-08, Vol.19 (8), p.506-509
1. Verfasser:	张鑫 宋小会 张殿琳
Format:	Artikel
Sprache:	eng
Schlagworte:	Deposition Diffraction Gold Grain boundaries Grain growth Grain size Surface roughness Two dimensional 原子力显微镜 晶粒尺寸 磁控溅射薄膜 表面形貌 表面粗糙度 金薄膜
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