Thickness dependence of grain size and surface roughness for dc magnetron sputtered Au films

The grain size and surface morphology of sputtered Au films are studied by x-ray diffraction and atomic force microscope. For as-deposited samples the grain growth mechanism is consistent with the two-dimensional （2D） theory, which gives relatively low diffusion coefficient during deposition. Anneal...

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Veröffentlicht in:	Chinese physics B 2010-08, Vol.19 (8), p.506-509
1. Verfasser:	张鑫宋小会张殿琳
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Sprache:	eng
Schlagworte:	Deposition Diffraction Gold Grain boundaries Grain growth Grain size Surface roughness Two dimensional 原子力显微镜晶粒尺寸磁控溅射薄膜表面形貌表面粗糙度金薄膜
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description	The grain size and surface morphology of sputtered Au films are studied by x-ray diffraction and atomic force microscope. For as-deposited samples the grain growth mechanism is consistent with the two-dimensional （2D） theory, which gives relatively low diffusion coefficient during deposition. Annealing process demonstrates the secondary grain growth mechanism in which the thickness dependence of grain boundary energy plays a key role. The surface roughness increases with the increase of grain size.
doi_str_mv	10.1088/1674-1056/19/8/086802
format	Article
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subjects	Deposition Diffraction Gold Grain boundaries Grain growth Grain size Surface roughness Two dimensional 原子力显微镜晶粒尺寸磁控溅射薄膜表面形貌表面粗糙度金薄膜
title	Thickness dependence of grain size and surface roughness for dc magnetron sputtered Au films
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