Lossless photon flux sensing methodology for EUV and Soft X-ray metrology systems

We demonstrate a simple, lossless method for monitoring photon flux in short-wavelength metrology systems, with a particular focus on applications using high harmonic generation (HHG) light sources. In HHG-based metrology, where photon scarcity often limits precision and efficiency, the ability to m...

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Bibliographische Detailangaben

Hauptverfasser:	Weerdenburg, Sven, Horsten, Roland, Coene, Wim
Format:	Artikel
Sprache:	eng
Schlagworte:	Physics - Applied Physics Physics - Instrumentation and Detectors Physics - Optics
Online-Zugang:	Volltext bestellen
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