Foundry compatible, efficient wafer-scale manufacturing of ultra-low loss, high-density Si$_3$N$_4$ photonic integrated circuits

Silicon nitride (Si$_3$N$_4$) photonic integrated circuits (PICs) have shown low linear loss, negligible nonlinear loss, and high power handling over traditional silicon photonics. To achieve high-density photonic integration and high effective nonlinearity through tight optical confinement, thick s...

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Hauptverfasser:	Ji, Xinru, Wang, Rui Ning, Liu, Yang, Riemensberger, Johann, Qiu, Zheru, Kippenberg, Tobias J
Format:	Artikel
Sprache:	eng
Schlagworte:	Physics - Applied Physics Physics - Optics
Online-Zugang:	Volltext bestellen
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