A real-time hole depth diagnostic based on coherent imaging with plasma amendment during femtosecondlaser hole-drilling

An in-process coherent imaging diagnostic has been developed to real-time measure the hole depth during air-film hole drilling by a femtosecond laser. A super-luminescent diode with a wavelength of 830~13 nm is chosen as the coherent light source which determines a depth resolution of 12 {\mu}m. The...

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Hauptverfasser: Xu, Ping, Yu, Yi, Xiao, Chijie, Liu, Ruijia, Zha, Kang, Zhou, Lin, Liu, Yongtao, Xu, Zhou
Format: Artikel
Sprache:eng
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