Investigation of the deposition of $\alpha$-tantalum (110) films on a-plane sapphire substrate by molecular beam epitaxy for superconducting circuit

J. Vac. Sci. Technol. B 41, 052210 (2023) Polycrystalline {\alpha}-tantalum (110) films deposited on c-plane sapphire substrate by sputtering are used in superconducting qubits nowadays. However, these films always occasionally form other structures, such as {\alpha}-tantalum (111) grains and \b{eta...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Jia, Haolin, Zhou, Boyi, Wang, Tao, Wu, Yanfu, Yang, lina, Ding, Zengqian, Li, Shuming, Xiong, Kanglin, Feng, Jiagui
Format:	Artikel
Sprache:	eng
Schlagworte:	Physics - Applied Physics Physics - Mesoscale and Nanoscale Physics
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!