Photonic integration of lithium niobate micro-ring resonators onto silicon nitride waveguide chips by transfer-printing

The heterogeneous integration of lithium niobate photonic waveguide devices onto a silicon nitride waveguide platform via a transfer-printing approach has been demonstrated for the first time. A fabrication process was developed to make free-standing lithium niobate membrane devices compatible with...

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Veröffentlicht in:	arXiv.org 2022-09
Hauptverfasser:	Li, Zhibo, Smith, Jack A, Scullion, Mark, Wessling, Nils Kolja, McKnight, Loyd J, Dawson, Martin D, Strain, Michael J
Format:	Artikel
Sprache:	eng
Schlagworte:	Direct laser writing Integrated circuits Lithium niobates Membranes Photonics Physics - Optics Resonators Silicon nitride Transfer printing Waveguides
Online-Zugang:	Volltext
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