Photonic integration of lithium niobate micro-ring resonators onto silicon nitride waveguide chips by transfer-printing
The heterogeneous integration of lithium niobate photonic waveguide devices onto a silicon nitride waveguide platform via a transfer-printing approach has been demonstrated for the first time. A fabrication process was developed to make free-standing lithium niobate membrane devices compatible with...
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| creator | Li, Zhibo Smith, Jack A Scullion, Mark Wessling, Nils Kolja McKnight, Loyd J Dawson, Martin D Strain, Michael J |
| description | The heterogeneous integration of lithium niobate photonic waveguide devices onto a silicon nitride waveguide platform via a transfer-printing approach has been demonstrated for the first time. A fabrication process was developed to make free-standing lithium niobate membrane devices compatible with back-end integration onto photonic integrated circuits. Micro-ring resonators in membrane format were lithographically defined by using laser direct writing and plasma dry etching. The lithium niobate micro-ring resonators were then transferred from their host substrate and released onto a silicon nitride waveguide chip. An all-pass ring resonator transmission spectrum was obtained in the 1.5 {\mu}m to 1.6 {\mu}m wavelength range, with a measured loaded Q-factor larger than 32000. |
| doi_str_mv | 10.48550/arxiv.2208.12192 |
| format | Article |
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A fabrication process was developed to make free-standing lithium niobate membrane devices compatible with back-end integration onto photonic integrated circuits. Micro-ring resonators in membrane format were lithographically defined by using laser direct writing and plasma dry etching. The lithium niobate micro-ring resonators were then transferred from their host substrate and released onto a silicon nitride waveguide chip. 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| subjects | Direct laser writing Integrated circuits Lithium niobates Membranes Photonics Physics - Optics Resonators Silicon nitride Transfer printing Waveguides |
| title | Photonic integration of lithium niobate micro-ring resonators onto silicon nitride waveguide chips by transfer-printing |
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