Heat Transport in Silicon Nitride Drum Resonators and its Influence on Thermal Fluctuation-induced Frequency Noise

Silicon nitride (SiN) drumhead resonators offer a promising platform for thermal sensing due to their high mechanical quality factor and the high temperature sensitivity of their resonance frequency. As such, gaining an understanding of heat transport in SiN resonators as well as their sensing noise...

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Hauptverfasser:	Snell, Nikaya, Zhang, Chang, Mu, Gengyang, Bouchard, Alexandre, St-Gelais, Raphael
Format:	Artikel
Sprache:	eng
Schlagworte:	Physics - Applied Physics
Online-Zugang:	Volltext bestellen
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