Multi defect detection and analysis of electron microscopy images with deep learning

Electron microscopy is widely used to explore defects in crystal structures, but human detecting of defects is often time-consuming, error-prone, and unreliable, and is not scalable to large numbers of images or real-time analysis. In this work, we discuss the application of machine learning approac...

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Veröffentlicht in:arXiv.org 2021-08
Hauptverfasser: Shen, Mingren, Li, Guanzhao, Wu, Dongxia, Liu, Yuhan, Greaves, Jacob, Hao, Wei, Krakauer, Nathaniel J, Krudy, Leah, Perez, Jacob, Sreenivasan, Varun, Sanchez, Bryan, Torres, Oigimer, Li, Wei, Field, Kevin, Morgan, Dane
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container_title arXiv.org
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creator Shen, Mingren
Li, Guanzhao
Wu, Dongxia
Liu, Yuhan
Greaves, Jacob
Hao, Wei
Krakauer, Nathaniel J
Krudy, Leah
Perez, Jacob
Sreenivasan, Varun
Sanchez, Bryan
Torres, Oigimer
Li, Wei
Field, Kevin
Morgan, Dane
description Electron microscopy is widely used to explore defects in crystal structures, but human detecting of defects is often time-consuming, error-prone, and unreliable, and is not scalable to large numbers of images or real-time analysis. In this work, we discuss the application of machine learning approaches to find the location and geometry of different defect clusters in irradiated steels. We show that a deep learning based Faster R-CNN analysis system has a performance comparable to human analysis with relatively small training data sets. This study proves the promising ability to apply deep learning to assist the development of automated microscopy data analysis even when multiple features are present and paves the way for fast, scalable, and reliable analysis systems for massive amounts of modern electron microscopy data.
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subjects Computer Science - Computer Vision and Pattern Recognition
Crystal defects
Crystal structure
Data analysis
Deep learning
Electron microscopy
Human performance
Machine learning
Microscopy
Physics - Materials Science
title Multi defect detection and analysis of electron microscopy images with deep learning
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