Precision of Evaluation Methods in White Light Interferometry: Correlogram Correlation Method

In this paper we promote a method for the evaluation of a surface topography which we call the correlogram correlation method. Employing a theoretical analysis as well as numerical simulations the method is proven to be the most accurate among available evaluation algorithms in the common case of un...

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Veröffentlicht in:	arXiv.org 2017-03
Hauptverfasser:	Kiselev, Ilia, Kiselev, Egor, Drexel, Michael, Hauptmannl, Michael
Format:	Artikel
Sprache:	eng
Schlagworte:	Algorithms Computer simulation Correlation analysis Physics - Instrumentation and Detectors White light interferometry
Online-Zugang:	Volltext
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