Scanning SQUID susceptometers with sub-micron spatial resolution
Superconducting QUantum Interference Device (SQUID) microscopy has excellent magnetic field sensitivity, but suffers from modest spatial resolution when compared with other scanning probes. This spatial resolution is determined by both the size of the field sensitive area and the spacing between thi...
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| creator | Kirtley, John R Paulius, Lisa Rosenberg, Aaron J Palmstrom, Johanna C Holland, Connor M Spanton, Eric M Schiessl, Daniel Jermain, Colin L Gibbons, Jonathan Fung, Y -K -K Huber, Martin E Ralph, Daniel C Ketchen, Mark B Gibson, Gerald W Moler, Kathryn A |
| description | Superconducting QUantum Interference Device (SQUID) microscopy has excellent magnetic field sensitivity, but suffers from modest spatial resolution when compared with other scanning probes. This spatial resolution is determined by both the size of the field sensitive area and the spacing between this area and the sample surface. In this paper we describe scanning SQUID susceptometers that achieve sub-micron spatial resolution while retaining a white noise floor flux sensitivity of \(\approx 2\mu\Phi_0/Hz^{1/2}\). This high spatial resolution is accomplished by deep sub-micron feature sizes, well shielded pickup loops fabricated using a planarized process, and a deep etch step that minimizes the spacing between the sample surface and the SQUID pickup loop. We describe the design, modeling, fabrication, and testing of these sensors. Although sub-micron spatial resolution has been achieved previously in scanning SQUID sensors, our sensors not only achieve high spatial resolution, but also have integrated modulation coils for flux feedback, integrated field coils for susceptibility measurements, and batch processing. They are therefore a generally applicable tool for imaging sample magnetization, currents, and susceptibilities with higher spatial resolution than previous susceptometers. |
| doi_str_mv | 10.48550/arxiv.1605.09483 |
| format | Article |
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This spatial resolution is determined by both the size of the field sensitive area and the spacing between this area and the sample surface. In this paper we describe scanning SQUID susceptometers that achieve sub-micron spatial resolution while retaining a white noise floor flux sensitivity of \(\approx 2\mu\Phi_0/Hz^{1/2}\). This high spatial resolution is accomplished by deep sub-micron feature sizes, well shielded pickup loops fabricated using a planarized process, and a deep etch step that minimizes the spacing between the sample surface and the SQUID pickup loop. We describe the design, modeling, fabrication, and testing of these sensors. Although sub-micron spatial resolution has been achieved previously in scanning SQUID sensors, our sensors not only achieve high spatial resolution, but also have integrated modulation coils for flux feedback, integrated field coils for susceptibility measurements, and batch processing. They are therefore a generally applicable tool for imaging sample magnetization, currents, and susceptibilities with higher spatial resolution than previous susceptometers.</description><identifier>EISSN: 2331-8422</identifier><identifier>DOI: 10.48550/arxiv.1605.09483</identifier><language>eng</language><publisher>Ithaca: Cornell University Library, arXiv.org</publisher><subject>Batch processing ; Field coils ; Magnetic permeability ; Microscopes ; Noise sensitivity ; Physics - Superconductivity ; Sensors ; Spatial resolution ; Superconducting quantum interference devices ; White noise</subject><ispartof>arXiv.org, 2016-07</ispartof><rights>2016. This work is published under http://arxiv.org/licenses/nonexclusive-distrib/1.0/ (the “License”). 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This spatial resolution is determined by both the size of the field sensitive area and the spacing between this area and the sample surface. In this paper we describe scanning SQUID susceptometers that achieve sub-micron spatial resolution while retaining a white noise floor flux sensitivity of \(\approx 2\mu\Phi_0/Hz^{1/2}\). This high spatial resolution is accomplished by deep sub-micron feature sizes, well shielded pickup loops fabricated using a planarized process, and a deep etch step that minimizes the spacing between the sample surface and the SQUID pickup loop. We describe the design, modeling, fabrication, and testing of these sensors. Although sub-micron spatial resolution has been achieved previously in scanning SQUID sensors, our sensors not only achieve high spatial resolution, but also have integrated modulation coils for flux feedback, integrated field coils for susceptibility measurements, and batch processing. They are therefore a generally applicable tool for imaging sample magnetization, currents, and susceptibilities with higher spatial resolution than previous susceptometers.</description><subject>Batch processing</subject><subject>Field coils</subject><subject>Magnetic permeability</subject><subject>Microscopes</subject><subject>Noise sensitivity</subject><subject>Physics - Superconductivity</subject><subject>Sensors</subject><subject>Spatial resolution</subject><subject>Superconducting quantum interference devices</subject><subject>White noise</subject><issn>2331-8422</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2016</creationdate><recordtype>article</recordtype><sourceid>ABUWG</sourceid><sourceid>AFKRA</sourceid><sourceid>AZQEC</sourceid><sourceid>BENPR</sourceid><sourceid>CCPQU</sourceid><sourceid>DWQXO</sourceid><sourceid>GOX</sourceid><recordid>eNotj1tLw0AUhBdBsNT-AJ8M-Jy4OZuTPXlT6q1QEGl9DpvNRrc0F3c3Xv69sfVphmEY5mPsIuVJRoj8Wrlv-5mkOceEFxmJEzYDIdKYMoAztvB-xzmHXAKimLGbjVZdZ7u3aPPyurqL_Oi1GULfmmCcj75seJ-yKm6tdn0X-UEFq_aRM77fj8H23Tk7bdTem8W_ztn24X67fIrXz4-r5e06VggQNw3mWGnJqUCTg4CasNZY1FmjRE0kZUVcKJy8lo3mJKtKFmSyohKGAMScXR5nD3jl4Gyr3E_5h1keMKfG1bExuP5jND6Uu3503fSpBE4cpUwJxC9BllUk</recordid><startdate>20160725</startdate><enddate>20160725</enddate><creator>Kirtley, John R</creator><creator>Paulius, Lisa</creator><creator>Rosenberg, Aaron J</creator><creator>Palmstrom, Johanna C</creator><creator>Holland, Connor M</creator><creator>Spanton, Eric M</creator><creator>Schiessl, Daniel</creator><creator>Jermain, Colin L</creator><creator>Gibbons, Jonathan</creator><creator>Fung, Y -K -K</creator><creator>Huber, Martin E</creator><creator>Ralph, Daniel C</creator><creator>Ketchen, Mark B</creator><creator>Gibson, Gerald W</creator><creator>Moler, Kathryn A</creator><general>Cornell University Library, arXiv.org</general><scope>8FE</scope><scope>8FG</scope><scope>ABJCF</scope><scope>ABUWG</scope><scope>AFKRA</scope><scope>AZQEC</scope><scope>BENPR</scope><scope>BGLVJ</scope><scope>CCPQU</scope><scope>DWQXO</scope><scope>HCIFZ</scope><scope>L6V</scope><scope>M7S</scope><scope>PIMPY</scope><scope>PQEST</scope><scope>PQQKQ</scope><scope>PQUKI</scope><scope>PRINS</scope><scope>PTHSS</scope><scope>GOX</scope></search><sort><creationdate>20160725</creationdate><title>Scanning SQUID susceptometers with sub-micron spatial resolution</title><author>Kirtley, John R ; Paulius, Lisa ; Rosenberg, Aaron J ; Palmstrom, Johanna C ; Holland, Connor M ; Spanton, Eric M ; Schiessl, Daniel ; Jermain, Colin L ; Gibbons, Jonathan ; Fung, Y -K -K ; Huber, Martin E ; Ralph, Daniel C ; Ketchen, Mark B ; Gibson, Gerald W ; Moler, Kathryn A</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-a522-ff565bc70895e6232d85dc59d4fa3d8877b803a53d8c7fc087bb798e49b3e8223</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2016</creationdate><topic>Batch processing</topic><topic>Field coils</topic><topic>Magnetic permeability</topic><topic>Microscopes</topic><topic>Noise sensitivity</topic><topic>Physics - Superconductivity</topic><topic>Sensors</topic><topic>Spatial resolution</topic><topic>Superconducting quantum interference devices</topic><topic>White noise</topic><toplevel>online_resources</toplevel><creatorcontrib>Kirtley, John R</creatorcontrib><creatorcontrib>Paulius, Lisa</creatorcontrib><creatorcontrib>Rosenberg, Aaron J</creatorcontrib><creatorcontrib>Palmstrom, Johanna C</creatorcontrib><creatorcontrib>Holland, Connor M</creatorcontrib><creatorcontrib>Spanton, Eric M</creatorcontrib><creatorcontrib>Schiessl, Daniel</creatorcontrib><creatorcontrib>Jermain, Colin L</creatorcontrib><creatorcontrib>Gibbons, Jonathan</creatorcontrib><creatorcontrib>Fung, Y -K -K</creatorcontrib><creatorcontrib>Huber, Martin E</creatorcontrib><creatorcontrib>Ralph, Daniel C</creatorcontrib><creatorcontrib>Ketchen, Mark B</creatorcontrib><creatorcontrib>Gibson, Gerald W</creatorcontrib><creatorcontrib>Moler, Kathryn A</creatorcontrib><collection>ProQuest SciTech Collection</collection><collection>ProQuest Technology Collection</collection><collection>Materials Science & Engineering Collection</collection><collection>ProQuest Central (Alumni Edition)</collection><collection>ProQuest Central UK/Ireland</collection><collection>ProQuest Central Essentials</collection><collection>ProQuest Central</collection><collection>Technology Collection</collection><collection>ProQuest One Community College</collection><collection>ProQuest Central Korea</collection><collection>SciTech Premium Collection</collection><collection>ProQuest Engineering Collection</collection><collection>Engineering Database</collection><collection>Publicly Available Content Database</collection><collection>ProQuest One Academic Eastern Edition (DO NOT USE)</collection><collection>ProQuest One Academic</collection><collection>ProQuest One Academic UKI Edition</collection><collection>ProQuest Central China</collection><collection>Engineering Collection</collection><collection>arXiv.org</collection><jtitle>arXiv.org</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Kirtley, John R</au><au>Paulius, Lisa</au><au>Rosenberg, Aaron J</au><au>Palmstrom, Johanna C</au><au>Holland, Connor M</au><au>Spanton, Eric M</au><au>Schiessl, Daniel</au><au>Jermain, Colin L</au><au>Gibbons, Jonathan</au><au>Fung, Y -K -K</au><au>Huber, Martin E</au><au>Ralph, Daniel C</au><au>Ketchen, Mark B</au><au>Gibson, Gerald W</au><au>Moler, Kathryn A</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Scanning SQUID susceptometers with sub-micron spatial resolution</atitle><jtitle>arXiv.org</jtitle><date>2016-07-25</date><risdate>2016</risdate><eissn>2331-8422</eissn><abstract>Superconducting QUantum Interference Device (SQUID) microscopy has excellent magnetic field sensitivity, but suffers from modest spatial resolution when compared with other scanning probes. This spatial resolution is determined by both the size of the field sensitive area and the spacing between this area and the sample surface. In this paper we describe scanning SQUID susceptometers that achieve sub-micron spatial resolution while retaining a white noise floor flux sensitivity of \(\approx 2\mu\Phi_0/Hz^{1/2}\). This high spatial resolution is accomplished by deep sub-micron feature sizes, well shielded pickup loops fabricated using a planarized process, and a deep etch step that minimizes the spacing between the sample surface and the SQUID pickup loop. We describe the design, modeling, fabrication, and testing of these sensors. Although sub-micron spatial resolution has been achieved previously in scanning SQUID sensors, our sensors not only achieve high spatial resolution, but also have integrated modulation coils for flux feedback, integrated field coils for susceptibility measurements, and batch processing. They are therefore a generally applicable tool for imaging sample magnetization, currents, and susceptibilities with higher spatial resolution than previous susceptometers.</abstract><cop>Ithaca</cop><pub>Cornell University Library, arXiv.org</pub><doi>10.48550/arxiv.1605.09483</doi><oa>free_for_read</oa></addata></record> |
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| subjects | Batch processing Field coils Magnetic permeability Microscopes Noise sensitivity Physics - Superconductivity Sensors Spatial resolution Superconducting quantum interference devices White noise |
| title | Scanning SQUID susceptometers with sub-micron spatial resolution |
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