Round Robin: Quantitative Lateral Resolution of PHI XPS microprobes Quantum 2000 / Quantera SXM

The quantitative lateral resolution is a reliable measure for the quality of an XPS microprobe equipped with a focused X-ray beam. It describes the long tail contributions of the X-ray beam intensity distribution. The knowledge of these long tail contributions is essential when judging on the origin...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	arXiv.org 2016-05
Hauptverfasser:	Scheithauer, U, Kolb, M, Kip, G A M, Naburgh, E, Snijders, J H M
Format:	Artikel
Sprache:	eng
Schlagworte:	Batch processing Design of experiments Physics - Instrumentation and Detectors Scanning electron microscopy X ray photoelectron spectroscopy
Online-Zugang:	Volltext
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