Superconducting cavity-electromechanics on silicon-on-insulator

Fabrication processes involving anhydrous hydrofluoric vapor etching are developed to create high-$Q$ aluminum superconducting microwave resonators on free-standing silicon membranes formed from a silicon-on-insulator wafer. Using this fabrication process, a high-impedance $8.9$GHz coil resonator is...

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Bibliographische Detailangaben

Hauptverfasser:	Dieterle, Paul B, Kalaee, Mahmoud, Fink, Johannes, Painter, Oskar
Format:	Artikel
Sprache:	eng
Schlagworte:	Physics - Mesoscale and Nanoscale Physics Physics - Quantum Physics
Online-Zugang:	Volltext bestellen
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