Shaping electron beams for the generation of innovative measurements in the (S)TEM

In TEM, a typical goal consists of making a small electron probe in the sample plane in order to obtain high spatial resolution in scanning transmission electron microscopy. In order to do so, the phase of the electron wave is corrected to resemble a spherical wave compensating for aberrations in th...

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Veröffentlicht in:	arXiv.org 2014-03
Hauptverfasser:	Verbeeck, Jo, Guzzinati, Giulio, Clark, Laura, Juchtmans, Roeland, Ruben Van Boxem, He, Tian, Béché, Armand, Lubk, Axel, Gustaaf Van Tendeloo
Format:	Artikel
Sprache:	eng
Schlagworte:	Electron beams Electron probes Magnetic lenses Physics - Materials Science Physics - Optics Scanning electron microscopy Scanning transmission electron microscopy Spatial resolution Spherical waves Transmission electron microscopy
Online-Zugang:	Volltext
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