Physical limitations in ferromagnetic inductively coupled plasma sources

The Ferromagnetic Inductively Coupled Plasma (FICP) source, which is a version of the common inductively coupled plasma sources, has a number of well known advantages such as high efficiency, high level of ionization, low minimal gas pressure, very low required driver frequency, and even a possibili...

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Veröffentlicht in:	arXiv.org 2012-11
Hauptverfasser:	Bliokh, Yury P, Felsteiner, Joshua, Slutsker, Yakov Z
Format:	Artikel
Sprache:	eng
Schlagworte:	Current pulses Ferromagnetism Gas pressure Inductively coupled plasma Ionization Neutral atoms Physics - Plasma Physics Plasma Plasma decay Plasma density
Online-Zugang:	Volltext
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