Design and Fabrication of Micromachined Resonators
Proceedings of the 6th International Conference on Smart Materials, Structures and Systems, January 04-07, 2012, Bangalore, India Microelectromechanical system (MEMS) based on-chip resonators offer great potential for sensing and high frequency signal processing applications due to their exceptional...
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| creator | Chaudhuri, Ritesh Ray Basu, Joydeep Bhattacharyya, Tarun Kanti |
| description | Proceedings of the 6th International Conference on Smart
Materials, Structures and Systems, January 04-07, 2012, Bangalore, India Microelectromechanical system (MEMS) based on-chip resonators offer great
potential for sensing and high frequency signal processing applications due to
their exceptional features like small size, large frequency-quality factor
product, integrability with CMOS ICs, low power consumption etc. This work is
mainly aimed at the design, modeling, simulation, and fabrication of
micromachined polysilicon disk resonators exhibiting radial-contour mode
vibrations. A few other bulk mode modified resonator geometries are also being
explored. The resonator structures have been designed and simulated in
CoventorWare finite-element platform and fabricated by the PolyMUMPs surface
micromachining process. |
| doi_str_mv | 10.48550/arxiv.1202.3048 |
| format | Article |
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Materials, Structures and Systems, January 04-07, 2012, Bangalore, India Microelectromechanical system (MEMS) based on-chip resonators offer great
potential for sensing and high frequency signal processing applications due to
their exceptional features like small size, large frequency-quality factor
product, integrability with CMOS ICs, low power consumption etc. This work is
mainly aimed at the design, modeling, simulation, and fabrication of
micromachined polysilicon disk resonators exhibiting radial-contour mode
vibrations. A few other bulk mode modified resonator geometries are also being
explored. The resonator structures have been designed and simulated in
CoventorWare finite-element platform and fabricated by the PolyMUMPs surface
micromachining process.</description><identifier>DOI: 10.48550/arxiv.1202.3048</identifier><language>eng</language><subject>Computer Science - Other Computer Science</subject><creationdate>2012-02</creationdate><rights>http://arxiv.org/licenses/nonexclusive-distrib/1.0</rights><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>228,230,776,881</link.rule.ids><linktorsrc>$$Uhttps://arxiv.org/abs/1202.3048$$EView_record_in_Cornell_University$$FView_record_in_$$GCornell_University$$Hfree_for_read</linktorsrc><backlink>$$Uhttps://doi.org/10.48550/arXiv.1202.3048$$DView paper in arXiv$$Hfree_for_read</backlink></links><search><creatorcontrib>Chaudhuri, Ritesh Ray</creatorcontrib><creatorcontrib>Basu, Joydeep</creatorcontrib><creatorcontrib>Bhattacharyya, Tarun Kanti</creatorcontrib><title>Design and Fabrication of Micromachined Resonators</title><description>Proceedings of the 6th International Conference on Smart
Materials, Structures and Systems, January 04-07, 2012, Bangalore, India Microelectromechanical system (MEMS) based on-chip resonators offer great
potential for sensing and high frequency signal processing applications due to
their exceptional features like small size, large frequency-quality factor
product, integrability with CMOS ICs, low power consumption etc. This work is
mainly aimed at the design, modeling, simulation, and fabrication of
micromachined polysilicon disk resonators exhibiting radial-contour mode
vibrations. A few other bulk mode modified resonator geometries are also being
explored. The resonator structures have been designed and simulated in
CoventorWare finite-element platform and fabricated by the PolyMUMPs surface
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Materials, Structures and Systems, January 04-07, 2012, Bangalore, India Microelectromechanical system (MEMS) based on-chip resonators offer great
potential for sensing and high frequency signal processing applications due to
their exceptional features like small size, large frequency-quality factor
product, integrability with CMOS ICs, low power consumption etc. This work is
mainly aimed at the design, modeling, simulation, and fabrication of
micromachined polysilicon disk resonators exhibiting radial-contour mode
vibrations. A few other bulk mode modified resonator geometries are also being
explored. The resonator structures have been designed and simulated in
CoventorWare finite-element platform and fabricated by the PolyMUMPs surface
micromachining process.</abstract><doi>10.48550/arxiv.1202.3048</doi><oa>free_for_read</oa></addata></record> |
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| subjects | Computer Science - Other Computer Science |
| title | Design and Fabrication of Micromachined Resonators |
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