Structure, Morphology, and Electrochemical Investigation of LiMn2O4 Thin Film Cathodes Deposited by Radio Frequency Sputtering for Lithium Microbatteries

Spinel lithium manganese oxide (LiMn2O4) cathode thin films were successfully deposited on different substrates such as Si, Pt/Al, and indium tin oxide (ITO)/Pt/Al by radio frequency (RF) sputtering. These thin films were investigated as positive electrodes for lithium microbatteries. The thickness...

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Veröffentlicht in:	Journal of physical chemistry. C 2009-07, Vol.113 (26), p.11373-11380
Hauptverfasser:	Hwang, Bing-Joe, Wang, Chien-Yu, Cheng, Ming-Yao, Santhanam, Raman
Format:	Artikel
Sprache:	eng ; jpn
Schlagworte:	C: Energy Conversion and Storage
Online-Zugang:	Volltext
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