Atomic Layer Deposition of Nanometer-Sized CeO2 Layers in Ordered Mesoporous ZrO2 Films and Their Impact on the Ionic/Electronic Conductivity

The physicochemical properties of thin metal oxide layers strongly depend on the layer thickness and thus differ significantly from their bulk counterpart. In this work, we present the growth of defined thin layers of CeO2 within mesostructured ZrO2 thin films using atomic layer deposition (ALD). Th...

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Veröffentlicht in:	ACS applied nano materials 2020-11, Vol.3 (11), p.10757-10766
Hauptverfasser:	Cop, Pascal, Celik, Erdogan, Hess, Kevin, Moryson, Yannik, Klement, Philip, Elm, Matthias T, Smarsly, Bernd M
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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