Rapid Wafer-Scale Growth of Polycrystalline 2H-MoS2 by Pulsed Metal–Organic Chemical Vapor Deposition

High-volume manufacturing of devices based on transition metal dichalcogenide (TMD) ultrathin films will require deposition techniques that are capable of reproducible wafer-scale growth with monolayer control. To date, TMD growth efforts have largely relied upon sublimation and transport of solid p...

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Veröffentlicht in:	Chemistry of materials 2017-08, Vol.29 (15), p.6279-6288
Hauptverfasser:	Kalanyan, Berc, Kimes, William A, Beams, Ryan, Stranick, Stephan J, Garratt, Elias, Kalish, Irina, Davydov, Albert V, Kanjolia, Ravindra K, Maslar, James E
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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