Geometry dependence of two-level-system noise and loss in a - Si C : H parallel-plate capacitors for superconducting microwave resonators von Kouwenhoven, K., van Doorn, G.P.J., Buijtendorp, B.T., de Rooij, S.A.H., Lamers, D., Thoen, D.J., Murugesan, V., Baselmans, J.J.A., de Visser, P.J.

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