Resist Pattern Collapse Modeling for Smaller Features von 형주 이(HANYANG, 오혜근(HANYANG, Ilsin An(HANYANG, Ji-Yong Yoo(HANYANG, Jun-Taek Park(HANYANG

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A Practical Method of Extracting the Photoresist Exposure Parameters by Using a Dose-to-Clear Swing Curve von 형희 김(HANYANG, 오혜근(HANYANG, Ilsin An(HANYANG, Ji-Yong Yoo(HANYANG, Seung -Wook Park(HANYANG, Young-Keun Kwon(HANYANG

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Self-calibrated Mueller-Matrix Spectroscopic Ellipsometry von kyoung-yoon Bang(HANYANG, ilsin an(HANYANG, Junsung An(HANYANG, robert collins

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Lens Aberration Effect on the Line Width for Different Pattern Shapes and Duty Ratios von Ji-Eun Lee(HANYANG, Seung-Wook Park(HANYANG, Chang-Ho Lee, 오혜근, 안일신

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Spectroscopic Ellipsometry Studies of Thin Films Prepared by Glancing Angle Deposition von K. Y. Bang(HANYANG, 안일신, 황보창권, E. H. Choi(HANYANG, J. . Kyung(HANYANG, 우석훈, Y. Park

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Picosecond Nonlinear Optical Transmission Measurement on Anatase TiO2 Thin Films von Min Jung Kim, 우정원, Bum Ku Rhee, 안일신, Ji Hoon Kwak(HANYANG, Jisoo Hwang, Seung Mook Lee

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Line-Width Variation with Absorber Thickness in Extreme Ultraviolet Lithography von Young-Doo JEON(HANYANG, 오혜근, 안일신, Jong-Sun KIM(HANYANG

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Bulk Effects of Thermal Flow Resists von sang-kon kim, 오혜근(HANYANG, Cheol-Kyu Bok, 안일신, Seung-Chan Moon, Sung-Muk Lee

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