Multi-step reaction mechanism for F atom interactions with organosilicate glass and SiOx films von Mankelevich, Yuri A, Voronina, Ekaterina N, Rakhimova, Tatyana V, Palov, Alexander P, Lopaev, Dmitry V, Zyryanov, Sergey M, Baklanov, Mikhail R

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Effect of porosity and pore size on dielectric constant of organosilicate based low-k films: An analytical approach von Palov, Alexander P., Voronina, Ekaterina N., Rakhimova, Tatyana V., Lopaev, Dmitri V., Zyryanov, Sergey M., Mankelevich, Yuri A., Krishtab, Mikhail B., Baklanov, Mikhail R.

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Pore sealing mechanism in OSG low‐k films under ion bombardment von Voronina, Ekaterina N., Sycheva, Anastasia A., Lopaev, Dmitry V., Rakhimova, Tatyana V., Rakhimov, Alexander T., Proshina, Olga V., Voloshin, Dmitry G., Zyryanov, Sergey M., Zotovich, Alexey I., Mankelevich, Yuri A.

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Fluorine atoms interaction with the nanoporous materials: experiment and DFT simulation von Mankelevich, Yuri A., Voronina, Ekaterina N., Rakhimova, Tatyana V., Palov, Alexander P., Lopaev, Dmitry V., Zyryanov, Sergey M., Baklanov, Mikhail R.

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Synergistic effect of VUV photons and F atoms on damage and etching of porous organosilicate films von Lopaev, Dmitry V., Zyryanov, Sergey M., Zotovich, Alexey I., Rakhimova, Tatyana V., Mankelevich, Yury A., Rakhimov, Alexander T., Baklanov, Mikhail R.

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Photoabsorption and damage of OSG low‐k films by VUV emission at 140–160nm von Lopaev, Dmitry V, Rakhlinsky, Vladislav V, Zyryanov, Sergey M, Mankelevich, Yury A, Rakhimova, Tatyana V, Kurchikov, Konstantin A, Baklanov, Mikhail R

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Experimental and DFT study of nitrogen atoms interactions with SiOCH low-κ films von Voronina, Ekaterina N., Mankelevich, Yuri A., Rakhimova, Tatyana V., Palov, Alexander P., Lopaev, Dmitry V., Zyryanov, Sergey M., Zotovich, Alexey I., Baklanov, Mikhail R.

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Photoabsorption and damage of OSG low‐k films by VUV emission at 140–160 nm von Lopaev, Dmitry V., Rakhlinsky, Vladislav V., Zyryanov, Sergey M., Mankelevich, Yury A., Rakhimova, Tatyana V., Kurchikov, Konstantin A., Baklanov, Mikhail R.

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Multi-step reaction mechanism for F atom interactions with organosilicate glass and SiO x films von Mankelevich, Yuri A, Voronina, Ekaterina N, Rakhimova, Tatyana V, Palov, Alexander P, Lopaev, Dmitry V, Zyryanov, Sergey M, Baklanov, Mikhail R

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Multi-step reaction mechanism for F atom interactions with organosilicate glass and SiO von Mankelevich, Yuri A, Voronina, Ekaterina N, Rakhimova, Tatyana V, Palov, Alexander P, Lopaev, Dmitry V, Zyryanov, Sergey M, Baklanov, Mikhail R

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Modification of Porous Ultralow‑k Film by Vacuum Ultraviolet Emission von Zotovich, Alexey I., Zyryanov, Sergey M., Lopaev, Dmitry V., Rezvanov, Askar A., Attallah, Ahmed G., Liedke, Maciej O., Butterling, Maik, Bogdanova, Maria A., Vishnevskiy, Alexey S., Seregin, Dmitry S., Vorotyntsev, Dmitry A., Palov, Alexander P., Hirschmann, Eric, Wagner, Andreas, Naumov, Sergej, Vorotilov, Konstantin A., Rakhimova, Tatyana V., Rakhimov, Alexander T., Baklanov, Mikhail R.

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Recombination of O and H Atoms on the Surface of Nanoporous Dielectrics von Rakhimova, T.V., Braginsky, O.V., Kovalev, A.S., Lopaev, D.V., Mankelevich, Y.A., Malykhin, E.M., Rakhimov, A.T., Vasilieva, A.N., Zyryanov, S.M., Baklanov, M.R.

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Recombination of O and H Atoms on the Surface of Nanoporous Dielectrics: Special Issue on Advances on Plasma Processing for Semiconductor Manufacturing von RAKHIMOVA, Tatyana V, BRAGINSKY, Oleg V, KOVALEV, Alexander S, LOPAEV, Dmitry V, MANKELEVICH, Yuri A, MALYKHIN, Evdokim M, RAKHIMOV, Alexander T, VASILIEVA, Anna N, ZYRYANOV, Sergey M, BAKLANOV, Mikhail R

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Data publication: Modification of Porous Ultralow‑k Film by Vacuum Ultraviolet Emission von Zotovich, Alexey I., Zyryanov, Sergey M., Lopaev, Dmitry V., Rezvanov, Askar A., Attallah, Ahmed Gamal, Liedke, Maciej Oskar, Butterling, Maik, Bogdanova, Maria A., Vishnevskiy, Alexey S., Seregin, Dmitry S., Vorotyntsev, Dmitry A. Vorotyntsev, Palov, Alexander P., Hirschmann, Eric, Wagner, Andreas, Naumov, Sergej, Vorotilov, Konstantin A., Rakhimova, Tatyana V., Rakhimov, Alexander T. R., Baklanov, Mikhail

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Data publication: Modification of Porous Ultralow‑k Film by Vacuum Ultraviolet Emission von Zotovich, Alexey I., Zyryanov, Sergey M., Lopaev, Dmitry V., Rezvanov, Askar A., Attallah, Ahmed Gamal, Liedke, Maciej Oskar, Butterling, Maik, Bogdanova, Maria A., Vishnevskiy, Alexey S., Seregin, Dmitry S., Vorotyntsev, Dmitry A. Vorotyntsev, Palov, Alexander P., Hirschmann, Eric, Wagner, Andreas, Naumov, Sergej, Vorotilov, Konstantin A., Rakhimova, Tatyana V., Rakhimov, Alexander T. R., Baklanov, Mikhail

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Safety and efficacy of an rAd26 and rAd5 vector-based heterologous prime-boost COVID-19 vaccine: an interim analysis of a randomised controlled phase 3 trial in Russia von Logunov, Denis Y, Dolzhikova, Inna V, Shcheblyakov, Dmitry V, Tukhvatulin, Amir I, Zubkova, Olga V, Dzharullaeva, Alina S, Kovyrshina, Anna V, Lubenets, Nadezhda L, Grousova, Daria M, Erokhova, Alina S, Botikov, Andrei G, Izhaeva, Fatima M, Popova, Olga, Ozharovskaya, Tatiana A, Esmagambetov, Ilias B, Favorskaya, Irina A, Zrelkin, Denis I, Voronina, Daria V, Shcherbinin, Dmitry N, Semikhin, Alexander S, Simakova, Yana V, Tokarskaya, Elizaveta A, Egorova, Daria A, Shmarov, Maksim M, Nikitenko, Natalia A, Gushchin, Vladimir A, Smolyarchuk, Elena A, Zyryanov, Sergey K, Borisevich, Sergei V, Naroditsky, Boris S, Gintsburg, Alexander L

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Technical and economic peculiarities of wood processing enterprises in modern conditions von Medvedev, Sergey, Zyryanov, Mikhail

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RETRACTED: Technological development of timber enterprises: equipment replacement mechanism von Medvedev, Sergey, Zyryanov, Mikhail, Gerasimova, Marina, Shvetsova, Irina

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An Antimicrobial Copper-Plastic Composite Coating: Characterization and In Situ Study in a Hospital Environment von Emelyanenko, Alexandre M, Omran, Fadi S, Teplonogova, Maria A, Chernukha, Marina Y, Avetisyan, Lusine R, Tselikina, Eugenia G, Putsman, Gleb A, Zyryanov, Sergey K, Butranova, Olga I, Emelyanenko, Kirill A, Boinovich, Ludmila B

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Quantum chemical study of the reactivity of 3-brommaleimide and 3-(arylamino)maleimide derivatives von Panov, Alexey A., Bykov, Eugeny E., Simonov, Alexander Y., Lavrenov, Sergey N., Korolev, Alexander M., Trenin, Alexey S.

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