Low-k protection from F radicals and VUV photons using a multilayer pore grafting approach von Zotovich, A, Rezvanov, A, Chanson, R, Zhang, L, Hacker, N, Kurchikov, K, Klimin, S, Zyryanov, S M, Lopaev, D, Gornev, E, Clemente, I, Miakonkikh, A, Maslakov, K

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Surface recombination of oxygen atoms in O2 plasma at increased pressure: I. The recombination probability and phenomenological model of surface processes von Lopaev, D V, Malykhin, E M, Zyryanov, S M

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Surface recombination of oxygen atoms in O2 plasma at increased pressure: II. Vibrational temperature and surface production of ozone von Lopaev, D V, Malykhin, E M, Zyryanov, S M

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Improving logging process efficiency in the context of rational natural resource management von Zyryanov, M., Shvetsov, V., Milyaeva, I., Dozhdev, E.

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Improving the efficiency of timber sawing process by increasing reliability of attachments for forestry equipment von Zyryanov, M., Saltanov, A., Davydenko, A., Dozhdev, E.

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The influence of additives from conifer foliage flouron quality of fiberboard von Zyryanov, M, Medvedev, S, Mokhirev, A

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Conceptual Problems of the Third Codification of the Legislation on Administrative Offenses von Zyryanov, Sergei M.

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The Model of Management of the Timber Industry Complex in the Conditions of Sustainable Development von Medvedev, S, Mokhirev, A, Rjabova, T, Pozdnyakova, M, Zyryanov, M

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Combustion Characteristics of Larch Sawmill Wastes and Their Partial Gasification Products von Zhuikov, A. V., Mokhirev, A. P., Tarasov, I. V., Nazirov, R. A., Zyryanov, M. A.

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Study of the process of processing felling residues in the conditions of logging operations von Zyryanov, M A, Medvedev, S O, Vititnev, A U, Shvecov, V U, Milyaeva, I G

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Improving the efficiency of the process of technological machines in the context of rational environmental management von Zyryanov, M A, Mokhirev, A P, Davydenko, A N, Gosman, A V

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Justification of transport and logistics routes for the movement of natural resources in order to minimize the impact on the environment von Medvedev, S O, Mokhirev, A P, Zyryanov, M A, Lyshko, A S

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Actinometry of O, N and F atoms von Lopaev, D V, Volynets, A V, Zyryanov, S M, Zotovich, A I, Rakhimov, A T

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“Virtual IED sensor” at an rf-biased electrode in low-pressure plasma von Bogdanova, M. A., Lopaev, D. V., Zyryanov, S. M., Rakhimov, A. T.

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Sputtering of amorphous Si by low-energy Ar+, Kr+, and Xe+ ions von Shibanov, D. R., Lopaev, D. V., Zyryanov, S. M., Zotovich, A. I., Maslakov, K. I., Rakhimov, A. T.

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Administrative Offence – Criminal Misdemeanor – Crime. Perspectives and Criteria Three-Tier Delictolisation in Russia von Zyryanov, Sergei M.

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Experimental study of transition from electron beam to rf-power-controlled plasma in DFCCP in argon with additional ionization by an electron beam von Zotovich, A I, Lopaev, D V, Bogdanova, M A, Zyryanov, S M, Rakhimov, A T

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Effect of porosity and pore size on dielectric constant of organosilicate based low-k films: An analytical approach von Palov, Alexander P., Voronina, Ekaterina N., Rakhimova, Tatyana V., Lopaev, Dmitri V., Zyryanov, Sergey M., Mankelevich, Yuri A., Krishtab, Mikhail B., Baklanov, Mikhail R.

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The mechanism of low-k SiOCH film modification by oxygen atoms von Braginsky, O. V., Kovalev, A. S., Lopaev, D. V., Malykhin, E. M., Mankelevich, Yu A., Rakhimova, T. V., Rakhimov, A. T., Vasilieva, A. N., Zyryanov, S. M., Baklanov, M. R.

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Multifold study of volume plasma chemistry in Ar/CF4 and Ar/CHF3 CCP discharges von Proshina, O V, Rakhimova, T V, Zotovich, A I, Lopaev, D V, Zyryanov, S M, Rakhimov, A T

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