Effect of pressure and space between electrodes on the deposition of SiNxHy films in a capacitively coupled plasma reactor von Meryem Grari, CifAllah Zoheir, Yasser Yousfi, Abdelhak Benbrik

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Enhancing plasma discharge dynamics through analysis of secondary electron emission: A numerical modeling approach for improved thin film deposition von Guetbach, Yassmina, Said, Sara, Grari, Meryem, El melhaoui, Ouafae, Zoheir, Cifallah

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Numerical Modeling of Plasma Silicon Discharge for Photovoltaic Application von Meryem, Grari, CifAllah, Zoheir

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Two-dimensional simulation of non-equilibrium silicon nitride plasma discharge for thin film solar cell deposition von Grari, Meryem, Zoheir, CifAllah

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Effect of pressure and space between electrodes on the deposition of SiN x H y films in a capacitively coupled plasma reactor von Grari, Meryem, Zoheir, CifAllah, Yousfi, Yasser, Benbrik, Abdelhak

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Numerical modeling of a hydrogenated silicon inductively coupled plasma discharge (SiH4/H2/Ar) von Yassmina, Guetbach, Meryem, Grari, Sara, Said, Abdenacer, Es-salhi, Cifallah, Zoheir

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Exploring Plasma Discharge Characteristics in Two-Dimensional Inductively Coupled Reactors: Insights from Maxwellian, Druyvesteyn, and Two-Term Boltzmann Electron Energy Distributi... von Guetbach, Yassmina, grari, Meryem, El melhaoui, Ouafae, Said, Sara, Zoheir, Cifallah

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