Fabrication of microlens arrays and planar photonic crystals using thermal amplification of resist von Sidorov, F A, Bruk, M A, Zhikharev, E N, Rogozhin, A E

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Dry e-beam etching of resist for optics von Rogozhin, A, Bruk, M, Zhikharev, E, Streltsov, D, Spirin, A, Hramchihina, J

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The new dry method of mask (relief) formation by direct electron-beam etching of resist von Bruk, M.A., Zhikharev, E.N., Streltsov, D.R., Kalnov, V.A., Spirin, A.V.

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Some peculiarities of a new method of microrelief creation by the direct electron-beam etching of resist von Bruk, M., Zhikharev, E., Streltsov, D., Kalnov, V., Spirin, A., Rogozhin, A.

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The mechanism of formation and some properties of thin fluorocarbon films deposited onto silicon plates by electron-beam polymerization of hexafluoropropylene from the vapor phase von Bruk, M. A., Zhikharev, E. N., Volegova, I. A., Spirin, A. V., Kozlova, N. V., Teleshov, E. N., Kal’nov, V. A.

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Formation of micro- and nanostructures with well-rounded profile by new e-beam lithography principle von Bruk, M.A., Zhikharev, E.N., Rogozhin, A.E., Streltsov, D.R., Kalnov, V.A., Averkin, S.N., Spirin, A.V.

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Nanophotonic structure formation by dry e-beam etching of the resist: resolution limitation origins von Rogozhin, A., Bruk, M., Zhikharev, E., Sidorov, F.

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Properties of thin poly(tetrafluoroethylene) films deposited on solid substrates by electron beam polymerization from vapor phase von Bruk, M. A., Zhikharev, E. N., Volegova, I. A., Spirin, A. V., Teleshov, E. N., Kal’nov, V. A.

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The new dry method of mask (relief) formation by direct electron-beam etching of resist von BRUK, M. A, ZHIKHAREV, E. N, STRELTSOV, D. R, KALNOV, V. A, SPIRIN, A. V

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Nanostructure of silicon-carbon composite thin films obtained using magnetron sputtering technique von Kupriyanov, L. Yu, Roginskaya, Yu. E., Kozlova, N. V., Politova, E. D., Kal’nov, V. A., Zhikharev, E. N.

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Lithium insertion into silicon films produced by magnetron sputtering von Roginskaya, Yu. E., Kulova, T. L., Skundin, A. M., Bruk, M. A., Zhikharev, E. N., Kal’nov, V. A.

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New type of the nanostructured composite Si/C electrodes von Roginskaya, Yu. E., Kulova, T. L., Skundin, A. M., Bruk, M. A., Zhikharev, E. N., Kal’nov, V. A., Loginov, V. B.

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Measurements of linear dimensions of silicon nanorelief elements with a near-rectangular profile by defocusing the electron probe of a scanning electron microscope von Valiev, K. A., Gavrilenko, V. P., Zhikharev, E. N., Danilova, M. A., Kal’nov, V. A., Larionov, Yu. V., Mityukhlyaev, V. B., Orlikovskii, A. A., Rakov, A. V., Todua, P. A., Filippov, M. N.

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The direct resist-free deposition of a lithographic mask from vapor initiated by an electron beam von Bruk, M. A., Zhikharev, E. N., Shevchuk, S. L., Volegova, I. A., Spirin, A. V., Teleshov, E. N., Kal’nov, V. A., Maishev, Yu. P.

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Features of resist-free formation of masking pattern by electron beam-induced vapor deposition von Bruk, M. A., Zhikharev, E. N., Shevchuk, S. L., Volegova, I. A., Spirin, A. V., Teleshov, E. N., Kal’nov, V. A., Maishev, Yu. P.

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Investigation of new dry high sensitive resist using 100 kV electron lithography von Babin, S.V., Holopkin, A.I., Lyakhov, M.N., Valiev, K.A., Velikov, L.V., Zhikharev, E.N.

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Thin polymer films deposition on different substrates by electron beam polymerization of monomers from vapour phase von Bruk, M., Kalnov, V., Spirin, A., Zhikharev, E.

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Optical and X-Ray Studies of Indium Oxide Films Deposited by DC Magnetron Sputtering von Tikhii, A.A., Sviridova, E.A., Zhikhareva, Y.I., Zhikharev, I.V.

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Zooplankton community structure in mouth areas of different rivers (tributaries of the lowland Cheboksary Reservoir, European Russia) von Zhikharev, V S, Gavrilko, D E, Shurganova, G V

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First Record of the Siberian Diaptomus Leptodiaptomus cf. angustilobus (Copepoda: Calanoida) in Europe von Zhikharev, V. S., Fefilova, E. B., Tereshina, M. A., Dubovskaya, O. P., Gavrilko, D. E., Shurganova, G. V.

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