Real-time modeling of VLSI IC manufacturing processes von Volk, S.V., Koukharenko, S.N., Zayats, A.M., Smimov, A.G.

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IC layout verification method, which considers mismatches between results of lithographical modeling and a real image von Koukharenko, S.N., Volk, S.V., Zayats, A.M., Smimov, A.G.

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Modeling and optimization of uniaxial magnetic pulse compaction of nanopowders von Olevsky, E. A., Bokov, A. A., Boltachev, G. Sh, Volkov, N. B., Zayats, S. V., Ilyina, A. M., Nozdrin, A. A., Paranin, S. N.

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Properties of compacts from BaF2 nano-powder obtained by pulsed electron beam evaporation von V.G. Ilves, S.Yu. Sokovnin, S.V. Zayats, A.M. Murzakaev, Т.М. Demina, M.G. Zuev

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Uniaxial compaction of nanopowders on a magnetic-pulse press von Bokov, A. A., Boltachev, G. Sh, Volkov, N. B., Zayats, S. V., Il’ina, A. M., Nozdrin, A. A., Paranin, S. N., Olevskii, E. A.

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Modeling of Thermal Processing at the Formation of Shallow Doped IC Active Regions von Komarov, A.F., Velichko, O.I., Zayats, G.M., Komarov, F.F., Miskiewicz, S.A., Mironov, A.M., Makarevich, Yu.V.

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Modelling of low-energy-implanted phosphorus diffusion during rapid thermal processing of the semiconductor structures von Mironov, A.M., Komarov, F.F., Komarov, A.F., Tsurko, V.A., Zayats, G.M., Velichko, O.I.

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Two-dimensional modelling of diffusion of low-energy implanted arsenic in silicon at rapid thermal annealing von Komarov, F.F., Mironov, A.M., Zayats, G.M., Tsurko, V.A., Velichko, O.I., Komarov, A.F., Belous, A.I.

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METHOD OF CHEMICAL COPPER PLATING OF HIGH DISPERSIVE CONDUCTING POYDERS von FIALKOV A.S, ROMANYUKHA A.M, VILCHINSKIJ YU.M, SLUTSKIJ R.L, UVAROVA G.A, ZAYATS N.N, PYATACHKOVA T.V, YUDINA T.F

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PROCESS FOR PREPARING FORMALDEHYDE von IDLIS G.S, ABRAMOV N.V, RADIONOV V.A, STARSHINOV B.N, BATALIN O.E, GOLOVACHEV A.M, VASIN V.M, ZAYATS A.I, DYKMAN A.S, SAFRONOV V.P, FOMIN A.V

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METHOD OF OBTAINING OIL SULFONATE von RAEVSKAYA T.V.,SU, GORBUNOV A.M.,SU, PRAVDIN V.G.,SU, GAEVOJ G.M.,SU, BOGOLEPOV A.V.,SU, CHISTYAKOV B.E.,SU, GERMASHEV V.G.,SU, MOSKVIN V.D.,SU, BABOSHIN B.K.,SU, SURGUCHEV M.L.,SU, ZEMENKOV D.I.,SU, MELNIK A.P.,SU, ZAYATS V.I.,SU, BOCHKAREV YU.A.,SU

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