Optical, electrical and mechanical properties of nitrogen-rich carbon nitride films deposited by inductively coupled plasma chemical vapor deposition von Popov, C, Zambov, L.M, Plass, M.F, Kulisch, W

Volltext

Capacitance humidity sensor with carbon nitride detecting element von ZAMBOV, L. M, POPOV, C, PLASS, M. F, BOCK, A, JELINEK, M, LANCOK, J, MASSELI, K, KULISCH, W

Volltext

Correlation between photoluminescence, optical and structural properties of amorphous nitrogen-rich carbon nitride films von PLASS, M. F, POPOV, C, IVANOV, B, MÄNDL, S, JELINEK, M, ZAMBOV, L. M, KULISCH, W

Volltext

Low-Pressure CVD of Carbon Nitride Using Triazine-Containing Precursors von Ivanov, B. L., Zambov, L. M., Georgiev, G. T., Popov, C., Plass, M. F., Kulisch, W.

Volltext

The effect of d.c. substrate bias on the properties of nitrogen-rich CNx films von Popov, C., Plass, M.F., Zambov, L.M., Kulisch, W.

Volltext

Gas-Sensitive Properties of Nitrogen-Rich Carbon Nitride Films von Zambov, L. M., Popov, C., Abedinov, N., Plass, M. F., Kulisch, W., Gotszalk, T., Grabiec, P., Rangelow, I. W., Kassing, R.

Volltext

The effect of d.c. substrate bias on the properties of nitrogen-rich CNx films von POPOV, C, PLASS, M. F, ZAMBOV, L. M, KULISCH, W

Volltext

Optical, electrical and mechanical properties of nitrogen-rich carbon nitride films deposited by inductively coupled plasma chemical vapor deposition von POPOV, C, ZAMBOV, L. M, PLASS, M. F, KULISCH, W

Volltext

Advanced Roll-to-Roll Plasma-Enhanced CVD Silicon Carbide Barrier Technology for Protection from Detrimental Gases von Zambov, L., Shamamian, V., Weidner, K., Loboda, M.

Volltext

Investigation of the thermal stability of nitrogen-rich amorphous carbon nitride films von Kulisch, W, Popov, C, Zambov, L, Buliř, J, Delplancke-Ogletree, M.P, Lančok, J, Jelı́inek, M

Volltext

Template-Directed CVD of Dielectric Nanotubes von Zambov, L., Zambova, A., Cabassi, M., Mayer, T.S.

Volltext

Stability of carbon nitride films prepared from volatile CN species via atomic transport reactions von Popov, C., Plass, M.F., Zambov, L., Kulisch, W.

Volltext

Physical properties of carbon nitride films synthesized using atomic transport reactions von Popov, C, Plass, M.F, Zambov, L, Bulir, J, Delplancke-Ogletree, M.-P, Kulisch, W

Volltext

Thin CNx films prepared by vacuum rapid thermal annealing von Beshkov, G, Dimitrov, DB, Georgiev, St, Petrov, P, Zambov, L, Ivanov, B, Popov, C, Georgiev, M

Volltext

On the mechanism of PxOy emission from a silicon pyrophosphate-containing solid planar diffusion source von Peev, G, Rouseva, M, Zambov, L

Volltext

On the mechanism of P x O y emission from a silicon pyrophosphate-containing solid planar diffusion source von Peev, G, Rouseva, M, Zambov, L

Volltext

On the mechanism of P sub(x)O sub(y) emission from a silicon pyrophosphate-containing solid planar diffusion source von Peev, G, Rouseva, M, Zambov, L

Volltext

Investigation of the thermal stability of nitrogen-rich amorphous carbon nitride films von KULISCH, W, POPOV, C, ZAMBOV, L, BULIR, J, DELPLANCKE-OGLETREE, M. P, LANCOK, J, JELINEK, M

Volltext

Characterization of arsenphosphosilicate glass films for VLSI applications—Part II. Step coverage and planarization von Zambov, L., Yanakiev, Y., Nedev, I., Anastassova, M.

Volltext

Characterization of arsenphosphosilicate glass films for VLSI applications. II : Step coverage and planarization von ZAMBOV, L, YANAKIEV, Y, NEDEV, I, ANASTASSOVA, M

Volltext