Advanced Roll-to-Roll Plasma-Enhanced CVD Silicon Carbide Barrier Technology for Protection from Detrimental Gases von Zambov, L., Shamamian, V., Weidner, K., Loboda, M.

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Optical, electrical and mechanical properties of nitrogen-rich carbon nitride films deposited by inductively coupled plasma chemical vapor deposition von Popov, C, Zambov, L.M, Plass, M.F, Kulisch, W

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Capacitance humidity sensor with carbon nitride detecting element von ZAMBOV, L. M, POPOV, C, PLASS, M. F, BOCK, A, JELINEK, M, LANCOK, J, MASSELI, K, KULISCH, W

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Correlation between photoluminescence, optical and structural properties of amorphous nitrogen-rich carbon nitride films von PLASS, M. F, POPOV, C, IVANOV, B, MÄNDL, S, JELINEK, M, ZAMBOV, L. M, KULISCH, W

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Investigation of the thermal stability of nitrogen-rich amorphous carbon nitride films von Kulisch, W, Popov, C, Zambov, L, Buliř, J, Delplancke-Ogletree, M.P, Lančok, J, Jelı́inek, M

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Kinetics of homogeneous decomposition of silane von Zambov, L.

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Low-Pressure CVD of Carbon Nitride Using Triazine-Containing Precursors von Ivanov, B. L., Zambov, L. M., Georgiev, G. T., Popov, C., Plass, M. F., Kulisch, W.

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Stability of carbon nitride films prepared from volatile CN species via atomic transport reactions von Popov, C., Plass, M.F., Zambov, L., Kulisch, W.

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Template-Directed CVD of Dielectric Nanotubes von Zambov, L., Zambova, A., Cabassi, M., Mayer, T.S.

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The effect of d.c. substrate bias on the properties of nitrogen-rich CNx films von Popov, C., Plass, M.F., Zambov, L.M., Kulisch, W.

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Physical properties of carbon nitride films synthesized using atomic transport reactions von Popov, C, Plass, M.F, Zambov, L, Bulir, J, Delplancke-Ogletree, M.-P, Kulisch, W

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Modelling of heat transfer processes in low-pressure CVD reactors von Zambov, L.

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Effect of vacuum rapid thermal annealing on the properties of SiNx films von Beshkov, G, Dimitrov, D.B, Velchev, N, Petrov, P, Ivanov, B, Zambov, L, Dimitrova, T

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Kinetics of the chemical reaction between dichlorosilane and ammonia during silicon nitride film deposition von Peev, G., Zambov, L., Yanakiev, Y.

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Thin CNx films prepared by vacuum rapid thermal annealing von Beshkov, G, Dimitrov, DB, Georgiev, St, Petrov, P, Zambov, L, Ivanov, B, Popov, C, Georgiev, M

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MECHANISM AND KINETICS OF MOLYBDENUM FILMS ETCHING IN PEROXIDE-AMMONIA SOLUTION von ZAMBOVA, A, ZAMBOV, L, STANTCHEV, K

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Optimization of low pressure silicon nitride film growth from dichlorosilane and ammonia in integrated circuit manufacture von Peev, G., Zambov, L.

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On the mechanism of PxOy emission from a silicon pyrophosphate-containing solid planar diffusion source von Peev, G, Rouseva, M, Zambov, L

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Gas-Sensitive Properties of Nitrogen-Rich Carbon Nitride Films von Zambov, L. M., Popov, C., Abedinov, N., Plass, M. F., Kulisch, W., Gotszalk, T., Grabiec, P., Rangelow, I. W., Kassing, R.

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Composition, structure and properties of silicon nitride films grown from dichlorosilane and ammonia at low pressure von Zambov, L., Peev, G., Shanov, V., Drumeva, S.

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