Thermal Laser Separation – A Novel Dicing Technology Fulfilling the Demands of Volume Manufacturing of 4H-SiC Devices von Zühlke, Hans Ulrich, Cerezuela Barreto, Mercedes, Schellenberger, Martin, Dohnke, Karl Otto, Lewke, Dirk, Ryssel, Heiner, Bauer, Anton J.

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Improving electric behavior and simplifying production of Si-based diodes by using thermal laser separation von Koitzsch, Matthias, Lewke, Dirk, Schellenberger, Martin, Pfitzner, Lothar, Ryssel, Heiner, Kolb, Robert, Zuhlke, Hans-Ulrich

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High Quality Half-cell Processing Using Thermal Laser Separation von Eiternick, Stefan, Kaule, Felix, Zühlke, Hans-Ulrich, Kießling, Thomas, Grimm, Michael, Schoenfelder, Stephan, Turek, Marko

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TLS-Dicing for SiC - Latest Assessment Results von Zühlke, Hans Ulrich, Schellenberger, Martin, Belgardt, Christian, Cerezuela Barreto, Mercedes, Lewke, Dirk, Dohnke, Karl Otto

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High Power Diode Lasers and Current Applications von Wolff, Detlev, Stolberg, Klaus, Zühlke, Hans-Ulrich

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검출기 모듈, 광전자 이미지 캡처 시스템 및 이미지 캡처를 위한 비행체 von KERL CHRISTIAN, ZUHLKE HANS ULRICH, RIENECKER STEFFEN, ZINTL ANDREAS, STELLMACH MATHIAS

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Advanced Vacuum Wafer Drying for Thermal Laser Separation Dicing Assessment Results from European Collaborative “SEAL” Project von Favre, Arnaud, Zühlke, Hans Ulrich, Bellet, Bertrand, Davenet, Magali, Schellenberger, Martin, Lewke, Dirk, Le Barillec, Olivier, Koitzsch, Matthias

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High Power Diode Lasers and Current Applications: Enabling features for DPSSL and laser micro processing von Wolff, Detlev, Stolberg, Klaus, Zühlke, Hans‐Ulrich

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TLS-Dicing - An innovative alternative to known technologies von Zuhlke, H.-U., Eberhardt, G., Ullmann, R.

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DETECTOR MODULE, OPTOELECTRONIC IMAGE CAPTURE SYSTEM AND AIRCRAFT FOR IMAGE CAPTURE von ZINTL, Andreas, ZÜHLKE, Hans-Ulrich, KERL, Christian, STELLMACH, Mathias, RIENECKER, Steffen

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DETECTOR MODULE, OPTOELECTRONIC IMAGE CAPTURE SYSTEM AND AIRCRAFT FOR IMAGE CAPTURE von ZINTL, Andreas, ZÜHLKE, Hans-Ulrich, KERL, Christian, STELLMACH, Mathias, RIENECKER, Steffen

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METHOD FOR SERVERING BRITTLE FLAT MATERIAL BY LASER BEAM, WITH TRACES PRODUCED PRIOR TO SEPARATION von ZUHLKE HANS ULRICH, LINKE TORSTEN, EBERHARDT GABRIELE

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DEVICE FOR WELDING BY MEANS OF LASER RADIATION von GABRIELE EBERHARDT, HANS-ULRICH ZUHLKE

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PACKING MATERIAL AND METHOD FOR THE PRODUCTION THEREOF von GABRIELE EBERHARDT, ULF FEISTEL, HANS-ULRICH ZUHLKE

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Method and device for separating a flat workpiece into a plurality of sections von LEWKE DIRK, TOBISCH ALEXANDER, ZUHLKE HANS-ULRICH, ALLENSTEIN FRANK, KOITZSCH MATTHIAS

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METHOD AND DEVICE FOR SEPARATING A FLAT WORKPIECE INTO MULTIPLE PARTS von ZÜHLKE, Hans-Ulrich, KOITZSCH, Matthias, LEWKE, Dirk, TOBISCH, Alexander

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METHOD AND DEVICE FOR SEPARATING A FLAT WORKPIECE INTO MULTIPLE PARTS von ZÜHLKE, HANS-ULRICH, LEWKE, DIRK, TOBISCH, ALEXANDER, KOITZSCH, MATTHIAS

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DETECTOR MODULE, OPTOELECTRONIC IMAGE CAPTURE SYSTEM AND AIRCRAFT FOR IMAGE CAPTURE von ZINTL, Andreas, ZÜHLKE, Hans-Ulrich, KERL, Christian, STELLMACH, Mathias, RIENECKER, Steffen

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Detektormodul, optoelektronisches Bildaufnahmesystem und Flugkörper zur Bildaufnahme von Zintl, Andreas, Stellmach, Mathias, Zühlke, Hans-Ulrich, Rienecker, Steffen, Kerl, Christian

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Verfahren und Vorrichtung zur Trennung einews flachen Werkstücks in mehrere Teilstücke von Zühlke, Hans-Ulrich, Koitzsch, Matthias, Lewke, Dirk, Tobisch, Alexander

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