Etch characteristics of magnetic tunnel junction materials using H-2/NH3 reactive ion beam von Kim, Ju Eun, Kim, Doo San, Gill, You Jung, Jang, Yun Jong, Kim, Ye Eun, Cho, Hanna, Won, Bok-Yeon, Kwon, Oik, Yoon, Kukhan, Choi, Jin-Young, Park, Jea-Gun, Yeom, Geun Young

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Improvement of Plasma Etching Endpoint Detection with Data-driven Wavelength Selection and Gaussian Mixture Model von Kim, Chae Sun, Lee, Hye Ji, Roh, Hae Rang, Park, Taekyoon, Lee, Yongseok, Han, Jewoo, Kwon, Sungun, Lee, Chanmin, Sun, Jongwoo, Yoon, Kukhan, Lee, Jong Min

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Etch characteristics of magnetic tunnel junction materials using H 2 /NH 3 reactive ion beam von Kim, Ju Eun, Kim, Doo San, Gill, You Jung, Jang, Yun Jong, Kim, Ye Eun, Cho, Hanna, Won, Bok-Yeon, Kwon, Oik, Yoon, Kukhan, Choi, Jin-Young, Park, Jea-Gun, Yeom, Geun Young

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Etch characteristics of magnetic tunnel junction materials using H2/NH3 reactive ion beam von Kim, Ju Eun, Kim, Doo San, Gill, You Jung, Jang, Yun Jong, Kim, Ye Eun, Cho, Hanna, Won, Bok-Yeon, Kwon, Oik, Yoon, Kukhan, Choi, Jin-Young, Park, Jea-Gun, Yeom, Geun Young

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SEMICONDUCTOR MEMORY DEVICES AND METHODS OF FORMING THE SAME von YOON KUKHAN, KIM HYONGSOO, GWAK BYOUNG-YONG

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Method of manufacturing semiconductor device von Hwang, Jungheun, Park, Yeong-Shin, Kim, Jihee, Yoon, Kukhan, Choi, Taeseop, Kim, Joonghee, Shin, Dongjun, Yoon, Hyun-Chul

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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE von Hwang, Jungheun, YOON, Hyun-Chul, Park, Yeong-Shin, Kim, Jihee, Yoon, Kukhan, Choi, Taeseop, Kim, Joonghee, Shin, Dongjun

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Method of forming a semiconductor memory device von YOON KYOUNG RYUL, SEO JUNGWOO, YOON KUKHAN

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Semiconductor memory devices and methods of forming the same von KIM HYONG-SOO, YOON KUKHAN, GWAK BYOUNG-YONG

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METHOD OF FORMING A SEMICONDUCTOR MEMORY DEVICE von YOON KYOUNG RYUL, SEO JUNGWOO, YOON KUKHAN

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Integrated circuit devices with capacitor and methods of manufacturing the same von KANG MANSUG, YOON KUKHAN, KIM HYONGSOO, PARK SANGJUN, PARK DONGKYUN

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INTEGRATED CIRCUIT DEVICES WITH CAPACITOR AND METHODS OF MANUFACTURING THE SAME von KANG MANSUG, YOON KUKHAN, KIM HYONGSOO, PARK SANGJUN, PARK DONGKYUN

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SEMICONDUCTOR MEMORY DEVICES AND METHODS OF FORMING THE SAME von KIM HYONG-SOO, YOON KUKHAN, GWAK BYOUNG-YONG

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Methods of fabricating a semiconductor memory device von CHO SUNGII, YOON KUKHAN, JEONG SANGSUP, KIM JONG-KYU, CHOI YONG-JOON, LEE JUNSOO

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Methods for forming fine patterns of a semiconductor device von NAM SEOKWOO, YOON KUKHAN, PARK JOON-SOO, KIM CHEOLHONG, KIM JOON

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Methods for forming fine patterns of a semiconductor device von NAM SEOKWOO, PARK JONGCHUL, YOON KUKHAN, PARK JOON-SOO, KIM CHEOLHONG

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METHODS FOR FORMING FINE PATTERNS OF A SEMICONDUCTOR DEVICE von NAM SEOKWOO, PARK JONGCHUL, YOON KUKHAN, PARK JOON-SOO, KIM CHEOLHONG

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METHODS FOR FORMING FINE PATTERNS OF A SEMICONDUCTOR DEVICE von NAM SEOKWOO, YOON KUKHAN, PARK JOON-SOO, KIM CHEOLHONG, KIM JOON

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Method for manufacturing semiconductor device von CHOI TAESEOP, HWANG JUNGHEUN, KIM JOONGHEE, YOON HYUN CHUL, KIM JIHEE, YOON KUKHAN, PARK YEONG SHIN, SHIN DONGJUN

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METHODS OF FABRICATING A SEMICONDUCTOR MEMORY DEVICE von CHO SUNGII, YOON KUKHAN, JEONG SANGSUP, KIM JONG-KYU, CHOI YONG-JOON, LEE JUNSOO

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