EUV PHOTORESIST COMPOSITION FOR EXTREME ULTRAVIOLET AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME von IM HONG GU, KIM JU YOUNG, YU NAE RY, PARK JI CHEOL, AHN SEONG HYEON, PARK JU HYEON, KO SUNG MIN

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Hard mask composition for spin-coating von Yi Song-se, Yu Nae-ry, Kim Boo-deuk, Choi Jung-sik, Kim Jung-hoon

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Methods of forming hardmask material film von Kim Min-soo, Lee Won-ki, Yi Song-se, Baek Jae-yeol, Song Hyun-ji, Yu Nae-ry, Kim Myeong-koo, Kim Hyun-woo

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Methods of detecting inhomogeneity of a layer and apparatus for performing the same von Ryu Jin-A, Park Jung-Dae, Lee Chang-Ho, Yu Nae-Ry, Kim Jung-Hoon, Jun Pil-Kwon, Kim Dong-Won, Kim Jae-Ho

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HARD MASK COMPOSITION FOR SPIN COATING von YU, NAE RY, KIM, BOO DEUK, CHOI, JUNG SIK, YI, SONG SE, KIM, JUNG HOON

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METHOD OF FORMING A HARDMASK MATERIAL LAYER von KIM, HYUN WOO, YU, NAE RY, KIM, MIN SOO, YI, SONG SE, SONG, HYUN JI, LEE, WON KI, BAEK, JAE YEOL, KIM, MYEONG KOO

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METHOD OF PRODUCIMG LAYER STRUCTURE LAYER STRUCTURE AND METHOD OF FORMING PATTERNS von KANG, SUN HAE, NAM, YOUN HEE, YOON, BYE RI, JEONG, SEUL GI, HONG, SEUNG HEE, YU, NAE RY, KIM, HEA JUNG, KIM, MIN SOO, KIM, YOUNG MIN, YI, SONG SE, BAEK, JAE YEOL, KIM, SUNG HWAN, HWANG, SUN MIN, JO, YEON HEE, KIM, SUNG MIN, LEE, CHUNG HEON, KIM, YUN JUN, SONG, HYUN JI, HWANG, WON JONG, YOON, YONG WOON, KIM, MYEONG KOO

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METHOD OF DETECTING INHOMOGENEITY OF A LAYER AND APPARATUS FOR PERFORMING THE SAME von KIM, DONG WON, KIM, JAE HO, YU, NAE RY, RYU, JIN A, LEE, CHANG HO, JUN, PIL KWON, KIM, JUNG HOON, PARK, JUNG DAE

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METHOD OF PRODUCIMG LAYER STRUCTURE, LAYER STRUCTURE, AND METHOD OF FORMING PATTERNS von KANG, SUN HAE, NAM, YOUN HEE, YOON, BYE RI, JEONG, SEUL GI, HONG, SEUNG HEE, YU, NAE RY, KIM, HEA JUNG, KIM, MIN SOO, KIM, YOUNG MIN, YI, SONG SE, BAEK, JAE YEOL, KIM, SUNG HWAN, HWANG, SUN MIN, JO, YEON HEE, KIM, SUNG MIN, LEE, CHUNG HEON, KIM, YUN JUN, SONG, HYUN JI, HWANG, WON JONG, YOON, YONG WOON, KIM, MYEONG KOO

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METHODS OF FORMING HARDMASK MATERIAL FILM von KIM Myeong-koo, YU Nae-ry, KIM Hyun-woo, SONG Hyun-ji, LEE Won-ki, YI Song-se, BAEK Jae-yeol, KIM Min-soo

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HARD MASK COMPOSITION FOR SPIN-COATING von KIM JUNG-HOON, KIM BOO-DEUK, YI SONG-SE, YU NAE-RY, CHOI JUNG-SIK

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Methods of Detecting Inhomogeneity of a Layer and Apparatus for Performing the Same von KIM DONG-WON, KIM JUNG-HOON, LEE CHANG-HO, YU NAE-RY, PARK JUNG-DAE, RYU JIN-A, KIM JAE-HO, JUN PIL-KWON

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Layer structure and method of producing the same, method of forming patterns, and semiconductor device von KIM, YOUNG-MIN, KIM, MIN-SOO, KANG, SUN-HAE, NAM, YOUN-HEE, KIM, SUNG-HWAN, YU, NAE-RY, JENONG, SEUL-GI, YI, SONG-SE, LEE, CHUNG-HEON, JO, YEON-HEE, HWANG, SUN-MIN, KIM, SUNG-MIN, YOON, YONG-WOON, SONG, HYUN-JI, KIM, YUN-JUN, BAEK, JAE-YEOL, KIM, HEA-JUNG, HONG, SEUNG-HEE, KIM, MYEONG-KOO, YOON, BYE-RI, HWANG, WON-JONG

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