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  1. 1
    SUBSTRATE SUPPORTING APPARATUS, SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME, AND MANUFACTURING METHOD THEREOF

    SUBSTRATE SUPPORTING APPARATUS, SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME, AND MANUFACTURING METHOD THEREOF von JEON, ILJUN, KIM, JAEHYUN, LEE, JONGHYUN, KIM, KIYONG, KIM, YOUNGKWON, YANG, YOODONG, KIM, HYUNGJOON, JEONG, HEE JONG, YOO, MINSUCK

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    Patent

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  2. 2
    Substrate support apparatus substrate process apparatus including the same and manufacturing method thereof

    Substrate support apparatus substrate process apparatus including the same and manufacturing method thereof von KIM KIYONG, YANG YOODONG, JEONG HEE JONG, LEE JONGHYUN, JEON ILJUN, KIM YOUNGKWON, KIM JAEHYUN, YOO MINSUCK, KIM HYUNGJOON

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    Patent

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  3. 3
    A study on the flexible and efficient instrument control software generation

    A study on the flexible and efficient instrument control software generation von Minsuck Shim, Sungkyu Park, Dae-Sung Yoo, Jong-Hwan Kim, Myeongjae Yi

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