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    Using thin undoped TEOS with BPTEOS ILD or BPTEOS ILD alone to improve charge loss and contact resistance in multi bit memory devices

    Using thin undoped TEOS with BPTEOS ILD or BPTEOS ILD alone to improve charge loss and contact resistance in multi bit memory devices von Cheng, Ning, Ngo, Minh Van, Tokuno, Hirokazu, You, Lu, Hui, Angela T, He, Yi, Mooney, Brian, Yang, Jean Yei-Mei, Ramsbey, Mark T

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    Using thin undoped TEOS with BPTEOS ILD or BPTEOS ILD alone to improve charge loss and contact resistance in multi bit memory devices

    Using thin undoped TEOS with BPTEOS ILD or BPTEOS ILD alone to improve charge loss and contact resistance in multi bit memory devices von YANG JEAN YEI-MEI, CHENG NING, RAMSBEY MARK T, NGO MINH VAN, HUI ANGELA T, MOONEY BRIAN, TOKUNO HIROKAZU, HE YI, YOU LU

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