Extra Low-Temperature SiO2 Deposition Using Aminosilanes von Suzuki, Ikuo, Dussarrat, Christian, Yanagita, Kazutaka

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A new RuO4 solvent solution for pure ruthenium film depositions von GATINEAU, Julien, YANAGITA, Kazutaka, DUSSARRAT, Christian

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High Utility of Saccharomyces cerevisiae Harboring Rat Liver Cytochrome P450 1A2 cDNA in Haloethanes Dehalogenations von Yanagita, Kazutaka, Sagami, Ikuko, Shimizu, Toru

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A new RuO 4 solvent solution for pure ruthenium film depositions von Gatineau, Julien, Yanagita, Kazutaka, Dussarrat, Christian

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Low Pressure Chemical Vapor Deposition of Tantalum-Based Material von Yanagita, Kazutaka, Dussarrat, Christian, Beyssac, Laurent

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Evaluation of Trisilylamine for HfSiOx Atomic Layer Deposition von Dussarrat, Christian, Suzuki, Ikuo, Yanagita, Kazutaka

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Precursor supply system and precursors supply method von Kumamoto, Yuki, Morimoto, Kouki, Kameoka, Takashi, Nakagawa, Toshiyuki, Suzuki, Kazuma, Yanagita, Kazutaka, Goto, Mikio

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SUPPLY SYSTEM FOR LOW VOLATILITY PRECURSORS von YANAGITA, Kazutaka, KOURA, Terumasa, MATSUMOTO, Koji, GOTO, Mikio, NOZAWA, Fumikazu, NAKAGAWA, Toshiyuki, SUZUKI, Kazuma, TARUTANI, Kohei, ISHIDA, Koji, OKUBO, Shingo, SUZUKI, Ikuo, KAMEOKA, Takashi

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SOLID MATERIAL CONTAINER AND SOLID MATERIAL PRODUCT IN WHICH SAID SOLID MATERIAL CONTAINER IS FILLED WITH A SOLID MATERIAL von AOYAMA, Toru, YANAGITA, Kazutaka, GOTO, Mikio, NAKAGAWA, Toshiyuki, SUZUKI, Kazuma, KAMEOKA, Takashi

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Method for deposition of silicon nitride layers von YANAGITA, KAZUTAKA, HIGASHINO, KATSUKO

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Distal Site and Surface Mutations of Cytochrome P450 1A2 Markedly Enhance Dehalogenation of Chlorinated Hydrocarbons von Yanagita, Kazutaka, Sagami, Ikuko, Shimizu, Toru

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METAL NITRIDE CONTAINING FILM DEPOSITION USING COMBINATION OF AMINO-METAL AND HALOGENATED METAL PRECURSORS von YANAGITA, KAZUTAKA, HIGASHINO, KATSUKO

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Marked Enhancement in the Reductive Dehalogenation of Hexachloroethane by a Thr319Ala Mutation of Cytochrome P450 1A2 von Yanagita, Kazutaka, Sagami, Ikuko, Daff, Simon, Shimizu, Toru

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METAL NITRIDE CONTAINING FILM DEPOSITION USING COMBINATION OF AMINO-METAL AND HALOGENATED METAL PRECURSORS von HIGASHINO KATSUKO, YANAGITA KAZUTAKA

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Distal site and surface mutations of cytochrome P450 1A2 markedly enhanced dehalogenations of chlorinated compounds von Yanagita, Kazutaka, Sagami, Ikuko, Shimizu, Toru

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METAL NITRIDE CONTAINING FILM DEPOSITION USING COMBINATION OF AMINO-METAL AND HALOGENATED METAL PRECURSORS von YANAGITA, KAZUTAKA, HIGASHINO, KATSUKO

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PRECURSOR SUPPLY SYSTEM AND PRECURSOR SUPPLY METHOD von YANAGITA, Kazutaka, GOTO, Mikio, NAKAGAWA, Toshiyuki, KUMAMOTO, Yuki, SUZUKI, Kazuma, MORIMOTO, Kouki, KAMEOKA, Takashi

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METAL NITRIDE CONTAINING FILM DEPOSITION USING COMBINATION OF AMINO-METAL AND HALOGENATED METAL PRECURSORS von YANAGITA, KAZUTAKA, HIGASHINO, KATSUKO

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METAL NITRIDE CONTAINING FILM DEPOSITION USING COMBINATION OF AMINO-METAL AND HALOGENATED METAL PRECURSORS von YANAGITA, KAZUTAKA, HIGASHINO, KATSUKO

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Metal heterocyclic compounds for deposition of thin films von OKUBO SHINGO, GATINEAU JULIEN, YANAGITA KAZUTAKA

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