Long-Term and Accelerated Life Testing of a Novel Single-Wafer Vacuum Encapsulation for MEMS Resonators von Candler, R.N., Hopcroft, M.A., Bongsang Kim, Woo-Tae Park, Melamud, R., Agarwal, M., Yama, G., Partridge, A., Lutz, M., Kenny, T.W.

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Electrical and Thermal Conduction in Atomic Layer Deposition Nanobridges Down to 7 nm Thickness von Yoneoka, Shingo, Lee, Jaeho, Liger, Matthieu, Yama, Gary, Kodama, Takashi, Gunji, Marika, Provine, J, Howe, Roger T, Goodson, Kenneth E, Kenny, Thomas W

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Temperature Dependence of Quality Factor in MEMS Resonators von Bongsang Kim, Hopcroft, M.A., Candler, R.N., Jha, C.M., Agarwal, M., Melamud, R., Chandorkar, S.A., Yama, G., Kenny, T.W.

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Development of a Silicon-Only Capacitive Dew Point Sensor von Stehle, Jochen, Samarao, Ashwin K., Yama, Gary, Krishnamoorthy, Uma, Ambacher, Oliver

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Impact of geometry on thermoelastic dissipation in micromechanical resonant beams von Candler, R.N., Duwel, A., Varghese, M., Chandorkar, S.A., Hopcroft, M.A., Woo-Tae Park, Bongsang Kim, Yama, G., Partridge, A., Lutz, M., Kenny, T.W.

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Scaling of amplitude-frequency-dependence nonlinearities in electrostatically transduced microresonators von Agarwal, Manu, Mehta, Harsh, Candler, Robert N., Chandorkar, Saurabh A., Kim, Bongsang, Hopcroft, Matthew A., Melamud, Renata, Bahl, Gaurav, Yama, Gary, Kenny, Thomas W., Murmann, Boris

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Hermeticity and diffusion investigation in polysilicon film encapsulation for microelectromechanical systems von Kim, Bongsang, Candler, Rob N., Melamud, Renata, Hopcroft, Matthew A., Yoneoka, Shingo, Lee, Hyung Kyu, Agarwal, Manu, Chandorkar, Saurabh A., Yama, Gary, Kenny, Thomas W.

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A study of electrostatic force nonlinearities in resonant microstructures von Agarwal, Manu, Chandorkar, Saurabh A., Mehta, Harsh, Candler, Robert N., Kim, Bongsang, Hopcroft, Matthew A., Melamud, Renata, Jha, Chandra M., Bahl, Gaurav, Yama, Gary, Kenny, Thomas W., Murmann, Boris

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Encapsulated submillimeter piezoresistive accelerometers von Woo-Tae Park, Partridge, A., Candler, R.N., Ayanoor-Vitikkate, V., Yama, G., Lutz, M., Kenny, T.W.

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SUSPENSION AND ABSORBER STRUCTURE FOR BOLOMETER von YAMA, Gary, FEYH, Ando, PURKL, Fabian

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Hermeticity and diffusion investigation in polysilicon film encapsulationfor microelectromechanical systems von Kim, Bongsang, Candler, Rob N., Melamud, Renata, Hopcroft, Matthew A., Yoneoka, Shingo, Lee, Hyung Kyu, Agarwal, Manu, Chandorkar, Saurabh A., Yama, Gary, Kenny, Thomas W.

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SYSTEM AND METHOD FOR MAINTAINING A SMOOTHED SURFACE ON A MEMS DEVICE von YAMA, Gary, STEHLE, Jochen

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SYSTEM AND METHOD FOR MAINTAINING A SMOOTHED AND ANTI-STICTION SURFACE ON A MEMS DEVICE von YAMA, Gary, STEHLE, Jochen

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MEMS INFRARED SENSOR INCLUDING A PLASMONIC LENS von O'BRIEN, Gary, YAMA, Gary, SAMARAO, Ashwin, FEYH, Ando, PURKL, Fabian

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WAFER WITH SPACER INCLUDING HORIZONTAL MEMBER von O'BRIEN, Gary, GRAHAM, Andrew, B, YAMA, Gary

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FLEXIBLE DISPOSABLE MEMS PRESSURE SENSOR von YEE, Seow, Yuen, YAMA, Gary

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Scaling of amplitude-frequency-dependence nonlinearitiesin electrostatically transduced microresonators von Agarwal, Manu, Mehta, Harsh, Candler, Robert N., Chandorkar, Saurabh A., Kim, Bongsang, Hopcroft, Matthew A., Melamud, Renata, Bahl, Gaurav, Yama, Gary, Kenny, Thomas W., Murmann, Boris

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PORTABLE DEVICE WITH TEMPERATURE SENSING von O'BRIEN, Gary, YAMA, Gary, FEYH, Ando

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System and Method for Maintaining a Smoothed and Anti-Stiction Surface on a MEMS Device von Stehle, Jochen, Yama, Gary

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System and Method for Maintaining a Smoothed Surface on a MEMS Device von Stehle, Jochen, Yama, Gary

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