High performance polysilicon thin film transistors by H2O plasma hydrogenation von Lee, Kan Yuan, Fang, Yean Kuen, Chen, Chii Wen, Liang, Mong Song, Wuu, Sou Gow

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Impact of hydrogenating plasma induced oxide charging effects on the characteristics of polysilicon thin film transistors von LEE, K. Y, FANG, Y. K, CHENG, C. W, HUANG, K. C, LIANG, M. S, WUU, S. G

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High performance polysilicon thin film transistors by H 2O plasma hydrogenation von Lee, Kan Yuan, Fang, Yean Kuen, Chen, Chii Wen, Liang, Mong Song, Wuu, Sou Gow

Volltext