Novel hydrofluorocarbon polymers for use as pellicles in 157 nm semiconductor photolithography: fundamentals of transparency von French, Roger H, Wheland, Robert C, Qiu, Weiming, Lemon, M.F, Zhang, Edward, Gordon, Joseph, Petrov, Viacheslav A, Cherstkov, Victor F, Delaygina, Nina I

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Evaluation of Next Generation Fluids for ArF Immersion Lithography Beyond Water von Tran, Hoang, French, Roger H., Adelman, Douglas J., Feldman, Jerald, Qiu, Weiming, Wheland, Robert C., Brubaker, Luke W., Fischel, Brian E., Fones, Barbara B., Lemon, Michael F., Yang, Min K., Nagao, Osami, Kaku, Mureo, Mocella, Michael, Schmieg, John J.

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157 nm Pellicles (Thin Films) for Photolithography:  Mechanistic Investigation of the VUV and UV-C Photolysis of Fluorocarbons von Lee, Kwangjoo, Jockusch, Steffen, Turro, Nicholas J, French, Roger H, Wheland, Robert C, Lemon, M. F, Braun, Andre M, Widerschpan, Tatjana, Dixon, David A, Li, Jun, Ivan, Marius, Zimmerman, Paul

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Quantum chemical modeling for 157 nm photolithography von Waterland, Robert L, Dobbs, Kerwin D, Rinehart, Amy M, Feiring, Andrew E, Wheland, Robert C, Smart, Bruce E

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Correlation of electrical conductivity in charge-transfer complexes with redox potentials, steric factors, and heavy atom effects von Wheland, Robert C

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New soluble teflon for coating onto plastics von Stewart, Charles W., Wheland, Robert C., Anolick, Colin, Tattersall, Thomas L.

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Variation of stoichiometry in tetrathiofulvalene-tetracyanoquinodimethane complexes von Wheland, Robert C.

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Stable long-chain fluoroxy compounds and their chemistry von Barnette, William E, Wheland, Robert C, Middleton, William J, Rozen, Shlomo

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Soluble Perfluoropolymers von Anolick, Colin, Hrivnak, Jeffrey A., Wheland, Robert C.

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Relation between methylenecyclopropane cycloadditions and biradical fluoroalkene cycloadditions von Bartlett, Paul D, Wheland, Robert C

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Rearrangements of dihydrodicyclopentadiene derivatives in phosphoric acid. 1,4-Hydride shifts von Wilder, Pelham, Cash, Derek J, Wheland, Robert C, Wright, George Wayne

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Nuclear magnetic resonance spectroscopy. Conformational equilibriums and equilibration of 3,3-difluoro-trans-cyclodecene von Noe, Eric A, Wheland, Robert C, Glazer, Edward S, Roberts, John D

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POLY(PERFLUOROETHER)ACYL PEROXIDES von WHELAND, ROBERT C

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TRANSPARENT COMPOSITE CONDUCTORS HAVING HIGH WORK FUNCTION von SMITH ERIC M, YEISLEY SHAWN, LECLOUX DANIEL D, HSU CHE-HSIUNG, WHELAND ROBERT C, SKULASON HJALTI

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TRANSPARENT COMPOSITE CONDUCTORS HAVING HIGH WORK FUNCTION von SMITH ERIC M, YEISLEY SHAWN, LECLOUX DANIEL D, HSU CHE-HSIUNG, WHELAND ROBERT C, SKULASON HJALTI

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Highly purified liquid perfluoro-n-alkanes and method for preparing von FRENCH ROGER H, WHELAND ROBERT C

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Use of Perfluoro-n-alkanes in vacuum ultraviolet applications von FRENCH ROGER H, WHELAND ROBERT C

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ULTRAVIOLET-TRANSPARENT ALKANES AND PROCESSES USING SAME IN VACUUM AND DEEP ULTRAVIOLET APPLICATIONS von QIU WEIMING, FRENCH ROGER H, PENG SHENG, WHELAND ROBERT C

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POROUS SUBSTRATES WITH A HIGH CONCENTRATION OF AMINE GROUPS von WHELAND, ROBERT C

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Ultraviolet-transparent alkanes and processes using same in vacuum and deep ultraviolet applications von FRENCH ROGER H.,PENG SHENG,WHELAND ROBERT C

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