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Doping concentration dependent piezoelectric behavior of Si:HfO2 thin-films
Veröffentlicht in Applied physics letters
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Correlation of microscopic and macroscopic electrical characteristicsof high- k Zr Si x O 2 − x thin films using tunneling atomic force microscopy
Veröffentlicht in Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena
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