Electron beam generated plasmas: Characteristics and etching of silicon nitride von Walton, S.G., Boris, D.R., Hernández, S.C., Lock, E.H., Petrova, Tz. B., Petrov, G.M., Jagtiani, A.V., Engelmann, S.U., Miyazoe, H., Joseph, E.A.

Volltext

Electron-beam-generated plasmas for materials processing von Walton, S.G, Muratore, C, Leonhardt, D, Fernsler, R.F, Blackwell, D.D, Meger, R.A

Volltext

Applications of electron-beam generated plasmas to materials processing von Leonhardt, D., Muratore, C., Walton, S.G.

Volltext

Plasma enhanced surface treatments using electron beam-generated plasmas von Leonhardt, D., Muratore, C., Walton, S.G., Meger, R.A.

Volltext

Low-temperature nitriding of stainless steel in an electron beam generated plasma von Muratore, C., Leonhardt, D., Walton, S.G., Blackwell, D.D., Fernsler, R.F., Meger, R.A.

Volltext

Time-resolved diagnostics in a pulsed, electron beam-generated plasma von Walton, S.G., Leonhardt, D., Fernsler, R.F.

Volltext

Extraction of positive and negative ions from electron-beam-generated plasmas von Walton, S. G., Leonhardt, D., Fernsler, R. F., Meger, R. A.

Volltext

On the extraction of positive and negative ions from electron-beam-generated plasmas von Walton, S. G., Leonhardt, D., Fernsler, R. F., Meger, R. A.

Volltext

Generation of electron-beam produced plasmas and applications to surface modification von Leonhardt, D., Muratore, C., Walton, S.G., Blackwell, D.D., Fernsler, R.F., Meger, R.A.

Volltext

Control of plasma flux composition incident on TiN films during reactive magnetron sputtering and the effect on film microstructure von Muratore, C., Walton, S. G., Leonhardt, D., Fernsler, R. F.

Volltext

Etching with electron beam generated plasmas von Leonhardt, D., Walton, S. G., Muratore, C., Fernsler, R. F., Meger, R. A.

Volltext

Effect of plasma flux composition on the nitriding rate of stainless steel von Muratore, C., Walton, S. G., Leonhardt, D., Fernsler, R. F., Blackwell, D. D., Meger, R. A.

Volltext

Plasma diagnostics in large area plasma processing system von Leonhardt, D., Walton, S. G., Blackwell, D. D., Amatucci, W. E., Murphy, D. P., Fernsler, R. F., Meger, R. A.

Volltext

Beam-generated plasmas for processing applications von Meger, R. A., Blackwell, D. D., Fernsler, R. F., Lampe, M., Leonhardt, D., Manheimer, W. M., Murphy, D. P., Walton, S. G.

Volltext

The role of O and Cl adsorbates on the secondary emission properties of tungsten von Vogan, W.S., Walton, S.G., Champion, R.L.

Volltext

Ion energy distributions in a pulsed, electron beam-generated plasma von Walton, S. G., Leonhardt, D., Blackwell, D. D., Fernsler, R. F., Murphy, D. P., Meger, R. A.

Volltext

Negative ion emission from a stainless steel surface due to positive ion collisions von Walton, S. G., Champion, R. L., Wang, Yicheng

Volltext

Low energy, ion-induced electron and ion emission from stainless steel: The effect of oxygen coverage and the implications for discharge modeling von Walton, S. G., Tucek, J. C., Champion, R. L., Wang, Yicheng

Volltext

Ion-induced secondary electron and negative ion emission from Mo/O von Tucek, J.C., Walton, S.G., Champion, R.L.

Volltext

Probe diagnostic development for electron beam produced plasmas von Blackwell, D. D., Walton, S. G., Leonhardt, D., Murphy, D. P., Fernsler, R. F., Amatucci, W. E., Meger, R. A.

Volltext