Correction of spherical surface measurements by confocal microscopy von Béguelin, Jeremy, Scharf, Toralf, Noell, Wilfried, Voelkel, Reinhard

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Coherent Ray Tracing Simulation Of Non-Imaging Laser Beam Shaping With Multi-Aperture Elements von Kirner, Raoul, Noell, Wilfried, Scharf, Toralf, Voelkel, Reinhard

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Fabrication and characterization of linear diffusers based on concave micro lens arrays von Bitterli, Roland, Scharf, Toralf, Herzig, Hans-Peter, Noell, Wilfried, de Rooij, Nico, Bich, Andreas, Roth, Sylvain, Weible, Kenneth J, Voelkel, Reinhard, Zimmermann, Maik, Schmidt, Michael

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Large micro-mirror arrays: key components in future space instruments for Universe and Earth Observation von Zamkotsian, Frederic, Lanzoni, Patrick, Canonica, Michael, Noell, Wilfried, Lani, Sebastien

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Tolerancing the surface form of aspheric microlenses manufactured by wafer-level optics techniques von Béguelin, Jeremy, Noell, Wilfried, Scharf, Toralf, Voelkel, Reinhard

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Improvements on the uniformity of large-area microlens arrays in Fused Silica von Kirner, Raoul, Béguelin, Jeremy, Eisner, Martin, Noell, Wilfried, Scharf, Toralf, Voelkel, Reinhard

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Printing sub-micron structures using Talbot mask-aligner lithography with a 193 nm CW laser light source von Vetter, Andreas, Kirner, Raoul, Opalevs, Dmitrijs, Scholz, Matthias, Leisching, Patrick, Scharf, Toralf, Noell, Wilfried, Rockstuhl, Carsten, Voelkel, Reinhard

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Optical characterization of high numerical aperture microlenses for quality assessment and fabrication process optimization von Béguelin, Jeremy, Symeonidis, Michael, Noell, Wilfried, Voelkel, Reinhard, Scharf, Toralf

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Computational rule-based approach for corner correction of non-Manhattan geometries in mask aligner photolithography von Vetter, Andreas, Yan, Chen, Kirner, Raoul, Scharf, Toralf, Noell, Wilfried, Voelkel, Reinhard, Rockstuhl, Carsten

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Mask-aligner lithography using a continuous-wave diode laser frequency-quadrupled to 193 nm von Kirner, Raoul, Vetter, Andreas, Opalevs, Dmitrijs, Gilfert, Christian, Scholz, Matthias, Leisching, Patrick, Scharf, Toralf, Noell, Wilfried, Rockstuhl, Carsten, Voelkel, Reinhard

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Refraction limit of miniaturized optical systems: a ball-lens example von Kim, Myun-Sik, Scharf, Toralf, Mühlig, Stefan, Fruhnert, Martin, Rockstuhl, Carsten, Bitterli, Roland, Noell, Wilfried, Voelkel, Reinhard, Herzig, Hans Peter

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A dual-axis pointing mirror with moving-magnet actuation von Ataman, Ça lar, Lani, Sébastien, Noell, Wilfried, de Rooij, Nico

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Buckled Bridges Using Film Stress for Three-Dimensional Structures: Effects of Lateral Designs on Vertical Profiles and Dynamic Characteristics von Sasaki, Minoru, Hane, Kazuhiro, Briand, Danick, Noell, Wilfried, de Rooij, Nicolaas F.

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Optical characterization of two-dimensional array of 2048 tilting micromirrors for astronomical spectroscopy von Canonica, Michael D., Zamkotsian, Frédéric, Lanzoni, Patrick, Noell, Wilfried, De Rooij, Nico

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Miniature lamellar grating interferometer based on silicon technology von MANZARDO, Omar, MICHAELY, Roland, SCHÄDELIN, Felix, NOELL, Wilfried, OVERSTOLZ, Thomas, DE ROOIJ, Nico, HERZIG, Hans Peter

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MEMS compatible micro-GRIN lenses for fiber to chip coupling of light von Zickar, Michael, Noell, Wilfried, Marxer, Cornel, de Rooij, Nico

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Arrays of High Tilt-Angle Micromirrors for Multiobject Spectroscopy von Waldis, S., Zamkotsian, F., Clerc, P.-A., Noell, W., Zickar, M., de de Rooij, N.

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Spectral phase, amplitude, and spatial modulation from ultraviolet to infrared with a reflective MEMS pulse shaper von Extermann, Jérôme, Weber, Stefan M, Kiselev, Denis, Bonacina, Luigi, Lani, Sébastien, Jutzi, Fabio, Noell, Wilfried, de Rooij, Nico F, Wolf, Jean-Pierre

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Ultraviolet and near-infrared femtosecond temporal pulse shaping with a new high-aspect-ratio one-dimensional micromirror array von WEBER, Stefan M, EXTERMANN, Jérôme, BONACINA, Luigi, NOELL, Wilfried, KISELEV, Denis, WALDIS, Severin, DE ROOIJ, Nico F, WOLF, Jean-Pierre

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Design, simulation, fabrication, packaging, and characterization of a MEMS-based mirror array for femtosecond pulse-shaping in phase and amplitude von Weber, Stefan M., Bonacina, Luigi, Noell, Wilfried, Kiselev, Denis, Extermann, Jérôme, Jutzi, Fabio, Lani, Sébastien, Nenadl, Ondrej, Wolf, Jean-Pierre, de Rooij, Nico F.

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