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  1. 1
    GAS INJECTOR APPARATUS FOR PLASMA APPLICATOR

    GAS INJECTOR APPARATUS FOR PLASMA APPLICATOR von WENZEL KEVIN WAYNE, JI CHENGXIANG, GU YOUFAN, POKIDOV ILYA, LOOMIS PAUL ASHBY, CHEN XING

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  2. 2
    Time of flight energy measurement apparatus for an ion beam implanter

    Time of flight energy measurement apparatus for an ion beam implanter von MCINTYRE, EDWARD KIRBY, JR, SAADATMAND, KOUROSH, SWENSON, DAVID RICHARD, WENZEL, KEVIN WAYNE, SCHERER, ERNST FREDERICK, DIVERGILIO, WILLIAM FRANK

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  3. 3
    Time of flight energy measurement apparatus for an ion beam implanter

    Time of flight energy measurement apparatus for an ion beam implanter von WENZEL KEVIN WAYNE, SCHERER ERNST FREDERICK, MCINTYRE, EDWARD KIRBY, JR, DIVERGILIO WILLIAM FRANK, SAADATMAND KOUROSH, SWENSON DAVID RICHARD

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  4. 4
    ION BEAM IMPLANTATION SYSTEM, ION BEAM ENERGY MEASURING DEVICE AND MEAN ION KINETIC ENERGY MEASURING DEVICE

    ION BEAM IMPLANTATION SYSTEM, ION BEAM ENERGY MEASURING DEVICE AND MEAN ION KINETIC ENERGY MEASURING DEVICE von WENZEL KEVIN WAYNE, SCHERER ERNST FREDERICK, MCINTYRE JR EDWARD K, DIVERGILIO WILLIAM FRANK, SAADATMAND KOUROSH, SWENSON DAVID RICHARD

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  5. 5
    Time of flight energy measurement apparatus for an ion beam implanter

    Time of flight energy measurement apparatus for an ion beam implanter von MCINTYRE, EDWARD KIRBY, JR, SAADATMAND, KOUROSH, SWENSON, DAVID RICHARD, WENZEL, KEVIN WAYNE, SCHERER, ERNST FREDERICK, DIVERGILIO, WILLIAM FRANK

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