Fabrication and characterization of linear diffusers based on concave micro lens arrays von Bitterli, Roland, Scharf, Toralf, Herzig, Hans-Peter, Noell, Wilfried, de Rooij, Nico, Bich, Andreas, Roth, Sylvain, Weible, Kenneth J, Voelkel, Reinhard, Zimmermann, Maik, Schmidt, Michael

Volltext

Two step process for the fabrication of diffraction limited concave microlens arrays von Ruffieux, Patrick, Scharf, Toralf, Philipoussis, Irène, Herzig, Hans Peter, Voelkel, Reinhard, Weible, Kenneth J

Volltext

Advanced mask aligner lithography: new illumination system von Voelkel, Reinhard, Vogler, Uwe, Bich, Andreas, Pernet, Pascal, Weible, Kenneth J, Hornung, Michael, Zoberbier, Ralph, Cullmann, Elmar, Stuerzebecher, Lorenz, Harzendorf, Torsten, Zeitner, Uwe D

Volltext

On the chromatic aberration of microlenses von Ruffieux, Patrick, Scharf, Toralf, Herzig, Hans Peter, Völkel, Reinhard, Weible, Kenneth J

Volltext

Applications of SOI-based optical MEMS von Noell, W., Clerc, P.-A., Dellmann, L., Guldimann, B., Herzig, H.-P., Manzardo, O., Marxer, C.R., Weible, K.J., Dandliker, R., de Rooij, N.

Volltext

Optical symbolic substitution using diffraction gratings von Thalmann, R, Pedrini, G, Weible, K J

Volltext

Despite challenges, array optics proliferate von Völkel, Reinhard, Weible, Kenneth J

Volltext

Tunable optical diffusers for high-power laser applications based on magnetically actuated membranes von Masson, J, Bich, A, Noell, W, Voelkel, R, Weible, K J, de Rooij, N F

Volltext

OPTICAL BEAM DEFLECTING ELEMENT AND METHOD OF ADJUSTMENT von DOLL, FLORIAN, VOELKEL, REINHARD, GERHARD, MICHAEL, WEIBLE, KENNETH, J, RUNDE, DANIEL, WEISS, GUNDULA

Volltext bestellen

Optical beam deflecting element, illumination system including the same, and method of adjusting imaging properties of a projection exposure system von DOLL, FLORIAN, VOELKEL, REINHARD, GERHARD, MICHAEL, RUNDE, DANIEL, WEIBLE, KENNETH J, WEISS, GUNDULA

Volltext bestellen

Illumination system for a microlithographic contact and proximity exposure apparatus von VOELKEL, REINHARD, VOGLER, UWE, KAISER, PAUL, HORNUNG, MICHAEL, WEIBLE, KENNETH J, CULLMANN, ELMAR, BICH, ANDREAS, EISNER, MARTIN, ZOBERBIER, RALPH

Volltext bestellen

Illumination system for a microlithographic contact and proximity exposure apparatus von VOELKEL, REINHARD, VOGLER, UWE, KAISER, PAUL, HORNUNG, MICHAEL, WEIBLE, KENNETH J, CULLMANN, ELMAR, BICH, ANDREAS, EISNER, MARTIN, ZOBERBIER, RALPH

Volltext bestellen

Process for the fabrication of optical microstructures von FISCHER, KATRIN, VOELKEL, REINHARD, HAEMBUECKER, STEFAN, SINHOFF, VOLKER, WEIBLE, KENNETH J, RUEBENACH, OLAF, EISNER, MARTIN

Volltext bestellen

Production of optically active micro-structures, e.g. lenses, comprises mechanically forming an optically active surface topography on a substrate, masking the topography by photol... von HAMBUECKER, STEFAN, FISCHER, KATRIN, VOELKEL, REINHARD, SINHOFF, VOLKER, WEIBLE, KENNETH J, RUEBENACH, OLAF, EISNER, MARTIN

Volltext bestellen

Two step process for the fabrication of diffraction limited concave microlens arrays von Ruffieux, Patrick, Scharf, Toralf, Philipoussis, Irène, Herzig, Hans Peter, Voelkel, Reinhard, Weible, Kenneth J

Volltext bestellen

OPTICAL BEAM DEFLECTING ELEMENT AND METHOD OF ADJUSTMENT von DOLL FLORIAN, WEISS GUNDULA, RUNDE DANIEL, VOLKEL REINHARD, WEIBLE KENNETH J, GERHARD MICHAEL

Volltext bestellen

Optical beam deflecting element, illumination system including the same, and method of adjusting imaging properties of a projection exposure system von DOLL, FLORIAN, VOELKEL, REINHARD, GERHARD, MICHAEL, RUNDE, DANIEL, WEIBLE, KENNETH J, WEISS, GUNDULA

Volltext bestellen

Process for the fabrication of optical microstructures von FISCHER, KATRIN, VOELKEL, REINHARD, HAEMBUECKER, STEFAN, SINHOFF, VOLKER, WEIBLE, KENNETH J, RUEBENACH, OLAF, EISNER, MARTIN

Volltext bestellen

Characterization of microlenses by digital holographic microscopy von Charrière, Florian, Kühn, Jonas, Colomb, Tristan, Montfort, Frédéric, Cuche, Etienne, Emery, Yves, Weible, Kenneth, Marquet, Pierre, Depeursinge, Christian

Volltext