Measurements of beam current density and proton fraction of a permanent-magnet microwave ion source von Waldmann, Ole, Ludewigt, Bernhard

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A compact neutron generator using a field ionization source von Persaud, Arun, Waldmann, Ole, Kapadia, Rehan, Takei, Kuniharu, Javey, Ali, Schenkel, Thomas

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Effects of palladium coating on field-emission properties of carbon nanofibers in a hydrogen plasma von Waldmann, Ole, Persaud, Arun, Kapadia, Rehan, Takei, Kuniharu, Allen, Frances I., Javey, Ali, Schenkel, Thomas

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Suprathermal electrons in a stationary magnetic arc discharge von Waldmann, Ole, Langowski, Martin, Fussmann, Gerd

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A compact neutron generator using a field ionization source von Persaud, Arun, Waldmann, Ole, Schenkel, Thomas, Kapadia, Rehan, Takei, Kuniharu, Javey, Ali

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Experimental investigation of the plasma-wall transition von Lunt, Tilmann, Fussmann, Gerd, Waldmann, Ole

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Reducing temperature transition in a substrate support von Zhang, Tao, Waldmann, Ole, Pape, Eric A

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REDUCING TEMPERATURE TRANSITION IN A SUBSTRATE SUPPORT von ZHANG, Tao, WALDMANN, Ole, PAPE, Eric A

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Method for reducing temperature transition in an electrostatic chuck von Waldmann Ole, Zhang Tao, Pape Eric A

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METHOD FOR REDUCING TEMPERATURE TRANSITION IN AN ELECTROSTATIC CHUCK von ZHANG Tao, PAPE Eric A, WALDMANN Ole

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System and method for reducing temperature transition in an electrostatic chuck von Waldmann Ole, Zhang Tao, Pape Eric A

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SYSTEM AND METHOD FOR REDUCING TEMPERATURE TRANSITION IN AN ELECTROSTATIC CHUCK von Waldmann Ole, Zhang Tao, Pape Eric A

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Method of determining thermal stability of a substrate support assembly von Leal-Verdugo, Carlos, Waldmann, Ole, Gaff, Keith William, Pape, Eric A

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System and method for reducing temperature transition in an electrostatic chuck von PAPE, ERIC A, WALDMANN, OLE, ZHANG, TAO

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Auto-correction of malfunctioning thermal control element in a temperature control plate of a semiconductor substrate support assembly that includes deactivating the malfunctioning... von Gaff Keith William, Waldmann Ole, Pape Eric A, Singh Harmeet

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Calculating power input to an array of thermal control elements to achieve a two-dimensional temperature output von O'Neill Robert Griffith, Waldmann Ole, Pape Eric A, Martinez Francisco

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AUTO-CORRECTION OF MALFUNCTIONING THERMAL CONTROL ELEMENT IN A TEMPERATURE CONTROL PLATE OF A SEMICONDUCTOR SUBSTRATE SUPPORT ASSEMBLY von ERIC A. PAPE, HARMEET SINGH, KEITH WILLIAM GAFF, OLE WALDMANN

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Auto-correction Of Malfunctioning Thermal Control Element In A Temperature Control Plate Of A Semiconductor Substrate Support Assembly von ERIC A. PAPE, HARMEET SINGH, KEITH WILLIAM GAFF, OLE WALDMANN

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AUTO-CORRECTION OF MALFUNCTIONING THERMAL CONTROL ELEMENT IN A TEMPERATURE CONTROL PLATE OF A SEMICONDUCTOR SUBSTRATE SUPPORT ASSEMBLY von SINGH HARMEET, PAPE ERIC A, GAFF KEITH WILLIAM, WALDMANN OLE

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METHOD OF DETERMINING THERMAL STABILITY OF A SUBSTRATE SUPPORT ASSEMBLY von Gaff Keith William, Waldmann Ole, Leal-Verdugo Carlos, Pape Eric A

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