Enhancement of the thermoelectric properties of PEDOT:PSS thin films by post-treatment von Luo, Jinji, Billep, Detlef, Waechtler, Thomas, Otto, Thomas, Toader, Marius, Gordan, Ovidiu, Sheremet, Evgeniya, Martin, Joerg, Hietschold, Michael, Zahn, Dietrich R. T., Gessner, Thomas

Volltext

New precursors for CVD copper metallization von Norman, John A.T., Perez, Melanie, Schulz, Stefan E., Waechtler, Thomas

Volltext

[Ag{S2CNR(C2H4OH)}] as Single-Source Precursor for Ag2S - Synthesis, Decomposition Mechanism, and Deposition Studies von Mothes, Robert, Jakob, Alexander, Waechtler, Thomas, Schulz, Stefan E., Gessner, Thomas, Lang, Heinrich

Volltext

Half-sandwich cobalt complexes in the metal-organic chemical vapor deposition process von Georgi, Colin, Hapke, Marko, Thiel, Indre, Hildebrandt, Alexander, Waechtler, Thomas, Schulz, Stefan E., Lang, Heinrich

Volltext

Surface chemistry of a Cu(I) beta-diketonate precursor and the atomic layer deposition of Cu2O on SiO2 studied by x-ray photoelectron spectroscopy von Dhakal, Dileep, Waechtler, Thomas, Schulz, Stefan E., Gessner, Thomas, Lang, Heinrich, Mothes, Robert, Tuchscherer, André

Volltext

[Ag{S 2 CNR(C 2 H 4 OH)}] as Single‐Source Precursor for Ag 2 S – Synthesis, Decomposition Mechanism, and Deposition Studies von Mothes, Robert, Jakob, Alexander, Waechtler, Thomas, Schulz, Stefan E., Gessner, Thomas, Lang, Heinrich

Volltext

[Ag{S sub(2)CNR(C sub(2)H sub( 4)OH)}] as Single-Source Precursor for Ag sub(2)S - Synthesis, Decomposition Mechanism, and Deposition Studies von Mothes, Robert, Jakob, Alexander, Waechtler, Thomas, Schulz, Stefan E, Gessner, Thomas, Lang, Heinrich

Volltext

Atomic layer deposition of ultrathin Cu2O and subsequent reduction to Cu studied by in situ x-ray photoelectron spectroscopy von Dhakal, Dileep, Assim, Khaybar, Lang, Heinrich, Bruener, Philipp, Grehl, Thomas, Georgi, Colin, Waechtler, Thomas, Ecke, Ramona, Schulz, Stefan E., Gessner, Thomas

Volltext

Ruthenocenes and Half-Open Ruthenocenes: Synthesis, Characterization, and Their Use as CVD Precursors for Ruthenium Thin Film Deposition von Tuchscherer, André, Georgi, Colin, Roth, Nina, Schaarschmidt, Dieter, Rüffer, Tobias, Waechtler, Thomas, Schulz, Stefan E., Oswald, Steffen, Gessner, Thomas, Lang, Heinrich

Volltext

ALD-grown seed layers for electrochemical copper deposition integrated with different diffusion barrier systems von Waechtler, Thomas, Ding, Shao-Feng, Hofmann, Lutz, Mothes, Robert, Xie, Qi, Oswald, Steffen, Detavernier, Christophe, Schulz, Stefan E., Qu, Xin-Ping, Lang, Heinrich, Gessner, Thomas

Volltext

Surface chemistry of a Cu(I) beta-diketonate precursor and the atomic layer deposition of Cu{sub 2}O on SiO{sub 2} studied by x-ray photoelectron spectroscopy von Dhakal, Dileep, Waechtler, Thomas, Schulz, Stefan E., Gessner, Thomas, Lang, Heinrich, Mothes, Robert, Tuchscherer, André

Volltext

Atomic layer deposition of ultrathin Cu{sub 2}O and subsequent reduction to Cu studied by in situ x-ray photoelectron spectroscopy von Dhakal, Dileep, Assim, Khaybar, Lang, Heinrich, Bruener, Philipp, Grehl, Thomas, Georgi, Colin, Waechtler, Thomas, Ecke, Ramona, Schulz, Stefan E., Gessner, Thomas

Volltext

Carbon nanotube based via interconnects: Performance estimation based on the resistance of individual carbon nanotubes von Fiedler, Holger, Toader, Marius, Hermann, Sascha, Rodriguez, Raul D., Sheremet, Evgeniya, Rennau, Michael, Schulze, Steffen, Waechtler, Thomas, Hietschold, Michael, Zahn, Dietrich R.T., Schulz, Stefan E., Gessner, Thomas

Volltext

Disilver(I) Coordination Complexes: Synthesis, Reaction Chemistry, and Their Potential Use in CVD and Spin-Coating Processes for Silver Deposition von Jakob, Alexander, Rüffer, Tobias, Schmidt, Heike, Djiele, Patrice, Körbitz, Kathrin, Ecorchard, Petra, Haase, Thomas, Kohse-Höinghaus, Katharina, Frühauf, Swantje, Wächtler, Thomas, Schulz, Stefan, Gessner, Thomas, Lang, Heinrich

Volltext

Magneto-optical Kerr-effect studies on copper oxide thin films produced by atomic layer deposition on SiO2 von Fronk, Michael, Müller, Steve, Waechtler, Thomas, Schulz, Stefan E., Mothes, Robert, Lang, Heinrich, Zahn, Dietrich R.T., Salvan, Georgeta

Volltext

Copper oxide atomic layer deposition on thermally pretreated multi-walled carbon nanotubes for interconnect applications von Melzer, Marcel, Waechtler, Thomas, Müller, Steve, Fiedler, Holger, Hermann, Sascha, Rodriguez, Raul D., Villabona, Alexander, Sendzik, Andrea, Mothes, Robert, Schulz, Stefan E., Zahn, Dietrich R.T., Hietschold, Michael, Lang, Heinrich, Gessner, Thomas

Volltext

Copper(I) Carboxylates of Type [(nBu3P)mCuO2CR] (m = 1, 2, 3) - Synthesis, Properties, and their Use as CVD Precursors von Jakob, Alexander, Shen, Yingzhong, Wächtler, Thomas, Schulz, Stefan E., Gessner, Thomas, Riedel, Ralf, Fasel, Claudia, Lang, Heinrich

Volltext

Phosphane copper(I) complexes as CVD precursors von Roth, Nina, Jakob, Alexander, Waechtler, Thomas, Schulz, Stefan E., Gessner, Thomas, Lang, Heinrich

Volltext

The Inhibition of Enhanced Cu Oxidation on Ruthenium∕Diffusion Barrier Layers for Cu Interconnects by Carbon Alloying into Ru von Ding, Shao-Feng, Xie, Qi, Müeller, Steve, Waechtler, Thomas, Lu, Hai-Sheng, Schulz, Stefan E., Detavernier, Christophe, Qu, Xin-Ping, Gessner, Thomas

Volltext

Magneto-optical Kerr effect studies of Cu2O/nickel heterostructures von Salvan, Georgeta, Robaschik, Peter, Fronk, Michael, Müller, Steve, Waechtler, Thomas, Schulz, Stefan E., Mothes, Robert, Lang, Heinrich, Schubert, Christian, Thomas, Senoy, Albrecht, Manfred, Zahn, Dietrich R.T.

Volltext