Development of pseudorandom binary arrays for calibration of surface profile metrology tools von Barber, Samuel K., Soldate, Paul, Anderson, Erik H., Cambie, Rossana, McKinney, Wayne R., Takacs, Peter Z., Voronov, Dmytro L., Yashchuk, Valeriy V.

Volltext

Ultra-high density diffraction grating von VORONOV DMYTRO L, CAMBIE ROSSANA, PADMORE HOWARD A, YASHCHUK VALERIY V, GULLIKSON ERIC M

Volltext bestellen

Ultra-high density diffraction grating von Padmore, Howard A, Voronov, Dmytro L, Cambie, Rossana, Yashchuk, Valeriy V, Gullikson, Eric M

Volltext bestellen

Ultra-high Density Diffraction Grating von VORONOV DMYTRO L, CAMBIE ROSSANA, PADMORE HOWARD A, YASHCHUK VALERIY V, GULLIKSON ERIC M

Volltext bestellen

A 10,000 groove/mm multilayer coated grating for EUV spectroscopy von Voronov, D L, Anderson, E H, Cambie, R, Cabrini, S, Dhuey, S D, Goray, L I, Gullikson, E M, Salmassi, F, Warwick, T, Yashchuk, V V, Padmore, H A

Volltext