Mechanical measurement of the residual stress in thin PVD films von Vijgen, R.O.E., Dautzenberg, J.H.

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A practical method for the determination of the Young's modulus and residual stresses of PVD thin films von Tran, M.D, Poublan, J, Dautzenberg, J.H

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TiN/PECVD-Si3N4/TiN diaphragm-based capacitive-type MEMS acoustic sensor von Lee, J, Jeon, J.H, Kim, Y.-G, Lee, S.Q, Yang, W.S, Lee, J.S, Lee, S.-G

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TiN/PECVD‐Si 3 N 4 /TiN diaphragm‐based capacitive‐type MEMS acoustic sensor von Lee, J., Jeon, J.H., Kim, Y.‐G., Lee, S.Q., Yang, W.S., Lee, J.S., Lee, S.‐G.

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Residual Stress and Tribological Performance of ZrN Coatings Produced by Reactive Bipolar Pulsed Magnetron Sputtering von Laera, Anna Maria, Massaro, Marcello, Dimaio, Domenico, Vencl, Aleksandar, Rizzo, Antonella

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A model for stress in thin layers induced by misfitting particles: An origin for growth stress von Kamminga, J.-D, de Keijser, Th.H, Delhez, R, Mittemeijer, E.J

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